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AssigneeInternational Business Machines Corporation
InventorsJoachim G. Clabes, Michael Hatzakis, Kam L. Lee, Bojan Petek, John C. Slonczewski
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Methods are described for producing a needle probe tip having prescribed magnetic properties for a scanning magnetic force microscope (MFM) on a substrate positioned in an evacuated environment. A substantially rigid, nanometer-scale needle-like structure is produced by selective decomposition of a volatile organic compound by a highly focussed electron beam. Processing steps are described to obtain prescribed magnetic properties of such a needle probe structure; in particular, the fabrication of a single magnetic domain, with hard or soft magnetic properties at the distal end of the needle structure. Three dimensional probe tips are also achieved. These magnetic sensing probes allow magnetic imaging at the nanometer-scale level.
A probe for a scanned-probe microscope, comprising:
The probe as recited in claim wherein said carbonized matrix includes metallic deposits interspersed therein.
The probe as recited in claim wherein said needle-shaped structure is provided with an expanded tip, said expanded tip exhibiting a three dimensional shape.
A structure comprising:
A structure comprising:
Dependencies are inferred from the claim text.