Laser processing device and laser processing method
AssigneeNtn Corporation
InventorsMasahiro Saruta, Tetsuji Sagisaka, Kazunari Maeda, Takumi Yashiki
Life of this patent
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Abstract
A laser processing device includes a Z stage movable in the up and down directions with respect to a XY stage movable in the X, Y directions on which an object to be processed is provided. The surface of the object to be processed is image-sensed by a CCD camera through a lens of an electrically-driven revolver attached to the Z stage, which is projected in a monitor. When a defect of the object is displayed in the monitor, a laser beam is radiated to a defective portion of the object from a laser head provided in the Z stage and the defective portion is removed.
Claims9
A laser processing device for inspecting an object to be processed for a defect by radiating a laser light to remove the defect, comprising;
- a laser beam source having its optical axis fixed with respect to a plane direction for emitting said laser beam;
- a table movable in a plane direction with respect to said laser beam for supporting said object to be processed;
- an optical system for observing a condition of processing of the object to be processed on said table;
- defect detecting means for inspecting the object to be processed for a defect on said table;
- and
- determining means for determining a defect position on said object to be processed according to a detection output of said defect detecting means and the present position in a plane on said table.
A laser processing device for inspecting an object for a defect and radiating a laser beam to remove a detected defect, comprising:
- a laser beam source having its axis fixed with respect to a plane direction for emitting said laser beam;
- a table movable in a plane direction with respect to said laser beam for supporting said object;
- an optical system including means for controlling
- (i) optically scanning said object on said table and providing a first output signal,
- (ii) determining defects in said object in response to said first output signal,
- (iii) calculating defect position coordinates for the determined defects,
- (iv) storing said defect position coordinates, and
- (v) outputting an image signal corresponding to said defect position coordinates;
- and
- display means for displaying said image signal corresponding to said defect position coordinates.
Dependencies are inferred from the claim text.