Low loss channel waveguide and method for making the same
AssigneeThe Boeing Company
InventorsKishore K. Chakravorty, Chung-Ping Chien
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Abstract
Optical waveguides for use in planar structures, such as dielectric layers in multichip modules exhibit low optical loss. The optical waveguides are provided by methods that involve doping of the dielectric layers. The waveguides can be used to interconnect electronic elements and transmit signals at speeds that are compatible with high speed electronic elements.
Claims25
A method for providing a channel for guiding electromagnetic waves in a substrate of a dielectric material, the method comprising the steps:
- selecting a dopant to alter the index of refraction of the dielectric material;
- selecting a solvent for introducing the dopant into the dielectric material by solvent diffusion;
- treating the dielectric material to render portions of the dielectric material resistant to diffusion by the solvent;
- and
- introducing the dopant into portions of the dielectric layer that have not been rendered resistant to diffusion by the solvent.
A method for providing a channel for guiding electromagnetic waves in a substrate of a dielectric material, the method comprising the steps:
- exposing portions of the dielectric material to radiation through a mask;
- and
- introducing a dopant into portions of the dielectric material that were not exposed to radiation, the dopant altering the index of refraction of the dielectric material.
A waveguide for electromagnetic waves comprising:
- a polyimide substrate;
- and
- a channel for guiding electromagnetic waves, the channel being defined in the polyimide and including a dopant that changes the index of refraction of the polyimide, portions of the polyimide around the channel being substantially free of the dopant.
A waveguide for electromagnetic waves comprising:
- a substrate of a dielectric material;
- and
- a channel for guiding electromagnetic waves defined in the dielectric material and including a dopant that changes the index of refraction of the dielectric material, the channel having a transverse cross-section substantially in the shape of a rectangle, portions of the dielectric material around the channel being substantially free of the dopant.
A waveguide for electromagnetic waves comprising:
- a substrate of a dielectric material;
- and
- a channel for guiding electromagnetic waves defined between doped portions of the dielectric material, the doped portions of the dielectric material having an index of refraction at least about 0.01 different from the index of refraction of the dielectric material in the channel.
A method for providing a channel for guiding electromagnetic waves in a substrate of polyimide, the method comprising the steps:
- depositing a masking material on the polyimide;
- patterning the masking material to uncover a portion of the polyimide;
- and
- introducing a dopant into the uncovered portion of the polyimide, the dopant altering the index of refraction of the polyimide.
A multi-chip module comprising:
- a layer of polyimide;
- and
- a channel for guiding electromagnetic waves defined within the polyimide and including a dopant that changes the index of refraction of the polyimide, portions of the polyimide around the channel being substantially free of the dopant.
A multi-chip module comprising:
- a layer of dielectric material;
- and
- a channel for guiding electromagnetic waves defined between doped portions of the dielectric material, the doped portions of the dielectric material having an index of refraction at least about 0.01 different from the index of refraction of the dielectric material in the channel.
A multi-chip module comprising:
- a layer of dielectric material;
- and
- a channel for guiding electromagnetic waves defined in a dielectric material and including a dopant that changes the index of refraction of the dielectric material, the channel having a transverse cross-section substantially in the shape of a rectangle, portions of the dielectric material around the channel being substantially free of the dopant.
A waveguide for electromagnetic waves comprising:
- a polyimide substrate;
- and
- a channel for guiding electromagnetic waves, the channel being defined in the polyimide and including a dopant that changes the index of refraction of the polyimide, wherein the loss of transmitted electromagnetic waves from the channel is less than about 0.5 dB/cm.
A multi-chip module comprising:
- a layer of polyimide;
- and
- a channel for guiding electromagnetic waves defined within the polyimide and including a dopant that changes the index of refraction of the polyimide, the index of refraction of the doped polyimide in the channel having an index of refraction at least about 0.01 different from the index of refraction of the polyimide.
Dependencies are inferred from the claim text.