Color deformable mirror device and method for manufacture

Abstract

A semiconductor device comprises a plurality of groups of colored mirrors controllable by electronic circuitry. Each group of colored mirrors absorb or reflect specified wavelengths of visible light. The electronic signals control the pathways on which each individual mirror reflect incident light. A first process for manufacturing such a color deformable mirror device ("DMD") includes aligning a dye-bearing substrate over the deformable mirror device and causing specified portions of the dye to sublimate off of the substrate and condense onto particular mirror elements of the deformable mirror device. A second process for producing a colored deformable mirror device places an electro static charge in a dye cloud and introduces the charged cloud to the DMD. The dye migrates to those selected mirrors containing an opposite electrical charge.

Dependencies are inferred from the claim text.