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US 5,167,078 AGranted
Compact photo resist dryer
AssigneeInternational Business Machines Corporation
InventorsLannie R. Bolde, John S. Groman
Life of this patent
Estimating the term…
Abstract
A photo resist drier for curing photo resist coatings on a metal foil is described. The dryer has an enclosure made of copper sheet and surrounded by strip heaters to heat the enclosure. The enclosure, heated by the heaters conducts heat and accordingly results in a more uniform internal temperature in the enclosure. The heaters are individually controllable. The vapors are captured by an exhaust system and removed from the dryer.
Claims13
A photo resist dryer comprising:
- a metal enclosure having five enclosed sides and an open side, at least two of said enclosed sides being parallel to each other and spaced apart to permit the insertion of a support structure therebetween;
- a support structure insertable into said enclosure;
- a plurality of heating means for heating said enclosure surrounding said enclosure;
- a plurality of heating means control means for controlling temperatures of said plurality of said heating means, at least some of said control means individually connected to individual heating means,
- whereby said plurality of said heating means heats said metal enclosure from the exterior of said metal enclosure and said control means control at least some of said heating means to produce a uniform heating of an object inserted within said enclosure.
2 more elements
A method of curing photo resist comprising the steps of:
- providing an enclosure defining at least five sides of a volume;
- heating said enclosure from outside said enclosure to a uniform temperature;
- covering an object with a coating of a photo resist solution, said solution comprising a solvent;;
- inserting said object with said photo resist coating into said enclosing;
- and heating said photo resist coating uniformly;
- and
- maintaining said object within said enclosure for sufficient time to remove said solvents from said coating.
4 more elements
A dryer comprising:
- a carrier for holding a workpiece to be dried, wherein the carrier has a frame for holding said workpiece;
- an exhaust manifold comprising an exhaust slot;
- a conductive enclosure adapted to receive said carrier, wherein said enclosure has an end opening over which said header fits;
- means for heating said conductive enclosure, said means for heating disposed within an insulating enclosure, said heating means adjustable to vary heat input over the conductive enclosure;
- and
- an exhaust header disposed to receive exhaust fumes from said exhaust slot.
3 more elements
Dependencies are inferred from the claim text.