Back to results
US 5,166,646 AGranted
Integrated tunable resonators for use in oscillators and filters
AssigneeMotorola, Inc.
InventorsBranko Avanic, Robert L. Benenati
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeMotorola, Inc.
InventorsBranko Avanic, Robert L. Benenati
Estimating the term…
An integrated tunable resonator (100) includes a common semiconductor carrier (110). Formed on the common semiconductor carrier (110) is an integrated voltage variable capacitor (104). A bulk acoustic wave resonator is formed on the common semiconductor carrier (110) and coupled to the voltage variable capacitor (104). In one aspect of the present invention, a thin film resonator (106) is coupled to the voltage variable capacitor (104) both of which are formed on a common semiconductor substrate (110). The combination of these three elements provide for a tunable integrated resonator (100). In another aspect of the present invention, a surface acoustic wave resonator (522), formed on a common semiconductor carrier (514), is coupled to a voltage variable capacitor (520) in order to provide a tunable resonator (500).
An integrated tunable resonator, comprising:
An integrated tunable resonator, comprising:
An integrated oscillator, comprising:
An integrated filter, comprising:
A wide bandwidth tunable resonator, comprising:
Dependencies are inferred from the claim text.