Universal, microfabricated probe for scanning probe microscopes
AssigneeThe Regents of the University of California
InventorsCraig Prater, Thomas B. Albrecht
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Abstract
A universal probe which can be used with many different types of scanning probe microscopes is disclosed. The probe is mounted on a flexible base. The flexible base may either be a flexible cantilevered beam or a flexible membrane. The probe is a sharply tapered probe and forms in general a squat hollow pyramid or cone. The apex of the pyramid or cone has an aperture defined therethrough with a small controlled diameter of the order of 10 to 50,000 Angstroms. The hollow within the probe is filled with a material chosen according to the type of the scanning probe microscope used and the underlying surface. A signal is coupled to the material in the tip of the probe from the scanning probe microscope to interact with the underlying surface.
Claims31
A universal probe for use with scanning probe microscopes based on different scanning technologies to scan an underlying surface comprising:
- mounting means for providing a flexible base;
- a sharply tapered hollow tip having an apex, said tip disposed on said mounting means;
- an aperture defined through said apex of said tip, said aperture having a predetermined diameter;
- and
- a selected material filling said hollow tip so that interaction of said material within said hollow tip through said aperture with said underlying surface is effectuated, said selected material being selected according to said interaction used by said scanning probe microscope to scan said underlying surface,
- whereby said probe is utilized in combination with a plurality of technologies in combination with said scanning probe microscope.
An improved probe for use with scanning probe microscopes comprising:
- means for providing a flexible base;
- a sharply tapered hollow tip having an apex, coupled to said means for providing a base;
- an aperture defined through said apex of said tip, said aperture having a predetermined diameter;
- a preselected material filling said hollow tip so that interaction of said material within said hollow tip through said aperture with an underlying surface to be scanned by said scanning probe microscope is made possible, said hollow tapered tip being a tapered prism and having a tapered prismatic cavity defined therein;
- and
- wherein said means has a standardized shape so that technology used by said scanning probe microscope may be changed without redesign of said scanning probe microscope by utilizing a different material for filling said hollow tip,
- whereby said improved probe is utilized in combination with a plurality of technologies in combination with said scanning probe microscope.
A probe for a scanning probe microscope for scanning an underlying surface comprising:
- a sharply tapered tip, said tip having a base and a height, said height of said tip being of the order of said base or less;
- a bore defined through said tip, said tip having an apex, said bore being defined through said apex to define an aperture at said apex;
- means for flexibly mounting said tip so that collisions of said tip with said underlying surface result in deflection of said tip without substantial damage to said tip or to said underlying surface;
- and
- interactive material disposed in said bore and exposed by said aperture at said apex of said tip, said interactive material being selectively chosen to interactively couple with said underlying surface when appropriate signals are applied from said scanning probe microscope, said material being coupled to said scanning probe microscope so that interaction through said material with said underlying surface is detected when scanning with said scanning probe microscope.
Dependencies are inferred from the claim text.