Resonant mechanical sensor

A resonant mechanical sensor for detecting an applied load, comprising:

• a substrate;
• a diaphragm substantially supported along the outer periphery thereof by said substrate;
• a boss member abutting a region of said diaphragm remote from said outer periphery;
• at least one resonator having one end integral with said diaphragm proximate to said region and another end integral with said diaphragm remote from said region;
• means for hermetically sealing and enclosing said resonator;
• and
• means for detecting a change in the natural frequency of said resonator due to an applied load.

A resonant mechanical sensor for detecting an applied mechanical load, comprising:

• a substrate;
• a diaphragm substantially supported along the outer periphery thereof by said substrate;
• a boss member abutting a region of said diaphragm remote from said outer periphery;
• at least one resonator in the form of a beam having one end integral with said diaphragm proximate to said region and another end integral with said diaphragm remote from said region;
• a first electrode disposed on said beam;
• a piezoelectric layer encapsulated by an insulator disposed on said first electrode;
• a second electrode disposed on said piezoelectric layer;
• and
• a hermetic cap enclosing said beam.

A method for fabricating a resonant mechanical sensor, comprising the steps of:

• forming a diaphragm substantially supported along its outer periphery by a substrate;
• providing a boss abutting a region of said diaphragm substantially remote from said outer periphery;
• and
• forming a resonator having one end integral to said diaphragm proximate to said region and another end integral to said diaphragm remote from said region.