Microvalve

Abstract

A microvalve has at least two pressurized-medium connections means forming a valve seat between the connections, a closure member cooperating with the valve seat, an electrical actuating unit deflecting the closure member, and a membrane which moves the closure member in opposition to he electrical actuating unit and adjoins a space which can be loaded with pressurized medium. The membrane has an area which is substantially reduced relative to the valve seat and is firmly joined to the membrane and also has a pressure-loaded area. The closure member has a ring-shaped pressure-compensation area which is opposite to the membrane and extends radially outwardly of the reduced surface of the membrane and counteracts the pressure loaded area of the membrane, the pressure-loaded area of the membrane and the pressure-compensation area of the closure member are essentially equally large.

Dependencies are inferred from the claim text.