Optical projection system

An optical apparatus for projecting a beam of electromagnetic radiation comprising:

• a first substantially planar reflecting surface;
• a second substantially planar reflecting surface;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being spaced apart by a predetermined distance;
• one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces;
• and
• a third substantially planar surface for reflecting said beam between one of said first and said second substantially planar surfaces and said at least one of said first and said second curved surfaces.

An optical apparatus for projecting a beam of electromagnetic radiation comprising:

• a first substantially planar reflecting surface;
• a second substantially planar reflecting surface;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being spaced apart by a predetermined distance;
• one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces;
• and
• an object to be imaged in an object plane and a substrate on which said object is imaged.

An optical apparatus for projecting a beam of electromagnetic radiation comprising:

• a first substantially planar reflecting surface;
• a second substantially planar reflecting surface;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and second curved reflecting surfaces being spaced apart by a predetermined distance;
• one of said first and said second substantially reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces;
• and
• a group of at least one lens for focusing said beam.

An optical apparatus for projecting a beam of electromagnetic radiation comprising:

• a first substantially planar reflecting surface;
• a second substantially planar reflecting surface;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being spaced apart by a predetermined distance;
• one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces;
• and a third substantially planar reflecting surface for reflecting said beam to provide an even number of reflections.

An optical apparatus for projecting a beam of electromagnetic radiation comprising:

• a first substantially planar reflecting surface;
• a second substantially planar reflecting surface;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being spaced apart by a predetermined distance;
• one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces;
• and
• wherein said beam is of a first wavelength which reflects from one of said first and second curved surfaces and wherein said beam is of a second wavelength which reflects from the other of said first and second curved surfaces.

An optical apparatus for projecting a beam of electromagnetic radiation comprising:

• a first substantially planar reflecting surface;
• a second substantially planar reflecting surface;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being spaced apart by a predetermined distance;
• one of said first and second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces;
• and
• wherein said beam is an ultraviolet beam.

An optical apparatus for projecting an alignment and image beam of electromagnetic radiation from an object onto a substrate comprising:

• a first, a second and a third substantially planar mutually perpendicular reflecting surfaces;
• a first and second concave reflecting surface having substantially the same axis and being spaced apart by a predetermined distance;
• a plano/convex refracting element;
• said first substantially planar surface being adapted to receiving said alignment and said image beams which are reflected to said second substantially planar surface from which one of said image and said alignment beams are reflected through said refracting element to one of said first and said second concave surfaces and the other of said image and alignment beams being reflected through said refracting element to the other of said first and second concave surfaces;
• and
• said image and said alignment beams being reflected from said first and said second concave surfaces through said refracting element to said third substantially planar surface and from said third surface onto said substrate.

An optical apparatus for projecting an alignment and image beam of electromagnetic radiation from an object onto a substrate comprising:

• a first, second and a third substantially planar mutually perpendicular reflecting surfaces;
• a first concave curved reflecting surface;
• a second concave curved reflecting surface;
• the axis of said first and said second curved reflecting surfaces being substantially coincident;
• said first and said second curved reflecting surfaces being spaced apart by a predetermined distance;
• a plano/convex refracting element;
• one of said first and said second substantially planar reflecting surfaces being adapted to receiving at least one of said beams of electromagnetic radiation and reflecting said at least one of said beams to at least one of said first and said second curved reflecting surfaces through said plano/convex refracting element from which said beam is reflected to the other of said first and said second substantially planar surfaces through said plano/convex refracting element;
• the other of said at least one beam reflecting off the other of said curved reflecting surface;
• and
• each of said alignment and said image beams reflecting off of said third planar surfaces.