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US 5,157,878 AGranted
Polishing method with error correction
AssigneeCanon Kabushiki Kaisha
InventorsToyohiko Hiyoshi, Mikio Iwata, Kazuo Watanabe, Shinkichi Ohkawa, Masanori Suzuki
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Abstract
A polishing apparatus for polishing optical components and mechanical parts requiring a high surface precision, such as lenses and mirrors, by pressing a running tape to such component.
Claims1
A method of working a surface of a workpiece with a tool, comprising the steps of:
- rotating the workpiece around an axis thereof and applying the tool onto the surface;
- pivoting the workpiece to a portion of the workpiece to be corrected;
- obtaining error curve data on the basis of ideal curve data of the surface and measuring data from a measurement of the surface;
- outputting a work amount curve data indicating an amount worked by the cutting tool at every pivoting angle of the workpiece;
- calculating work time at every pivoting angle from cutting tool capability data and work amount curve data;
- calculating a pivoting speed at every pivoting angle of the workpiece from an inverse of work time;
- and
- working the surface with the cutting tool on the basis of the calculated pivoting speed at every pivoting angle of the workpiece.
5 more elements
Dependencies are inferred from the claim text.