US 5,157,136 A · Single-source metalloorganic precursors to produce II/VI materials

Abstract

The present invention relates a precursor metal organic compound of the formula: (R.sub.3 --Si).sub.3 --Y--Q--M--A (I) wherein M is selected from the Group IIb elements of zinc, cadmium, or mercury; A is selected from amide, alkyl having from 1 to 10 carbon atoms, aryl, substituted aryl, or --Q'--Y'--(Si--R'.sub.3).sub.3 L.sub.2 wherein L is selected from nothing or a Lewis base ligand, Q and Q' are each independently selected from Group VIa elements of sulfur, selenium, or tellurium; and Y and Y' are each independently selected from carbon, silicon, germanum and tin, and R and R' are each independently selected from alkyl having from 1 to 10 carbon atoms, aryl or substituted aryl. In a preferred embodiment, A is --Q'--Y'--(Si--R'.sub.3)L.sub.2 where L is nothing or a Lewis base ligand, especially wherein Q.dbd.Q', Y.dbd.Y' and R.dbd.R'. Methods of producing these compounds are also disclosed. These precursor materials provide in a single compound the binary, tertiary or quaternary metals in a ratio to each other that is controllable by judicious choise of metal atoms and organic substituents. The metal alloys are useful in a variety of electronic applications, particularly in semiconductors.

Claims21

Dependent claims

A metal compound of the formula:

(R.sub.3 --Si).sub.3 --Y--Q--M--A (I)
wherein M is selected from the Group IIb elements of zinc, cadmium, or mercury;
A is selected from amide, alkyl having from 1 to 20 carbon atoms, aryl, substituted aryl, or --Q'--Y'--(Si--R'.sub.3).sub.3 L.sub.2 wherein L is selected from nothing or a Lewis base ligand,
Q and Q' are each independently selected from Group VIa elements of sulfur, selenium, or tellurium;
and
Y and Y' are each independently selected from carbon, silicon, germanum or tin, and
R and R' are each independently selected from alkyl having from 1 to 20 carbon atoms, aryl or substituted aryl.

4 more elements

A process for the production of a metal organic compound of the formula:

(R.sub.3 --Si).sub.3 --Y--Q--M--A (I)
wherein M is selected from the Group II b elements of zinc, cadmium, or mercury;
A is selected from amide, alkyl having from 1 to 20 carbon atoms, aryl, substituted aryl, or --Q'--Y'--(Si--R'.sub.3).sub.3 L.sub.2 wherein L is nothing or a Lewis base ligand,
Q and Q' are each independently selected from Group VIa elements of sulfur, selenium, or tellurium;
and
Y and Y' are each independently selected from carbon, silicon, germanum or tin, and
R and R' are each independently selected from alkyl having from 1 to 20 carbon atoms, aryl or substituted aryl,
which process comprises:
(A) contacting L'.sub.3 --Z--Y--(SiR.sub.3).sub.3 wherein L' is independently selected from ligand L,
Z is independently selected from lithium, sodium, potassium, calcium, barium or strontium;
and
Y and R are defined hereinabove, with a metal powder Q wherein Q is defined hereinabove, in a hydrocarbon solvent under an inert anhydrous atmosphere for between about 0.0 and 2 hr at between about -20.degree. and +30.degree. C.;
(B) contacting the product of step (A) with a strong acid to produce and separate by removal of the hydrocarbon solvent
H--Q--Y--(SiR.sub.3).sub.3
where Q, Y and R are defined hereinabove;
(C) contacting the product of step (B) with:
(1) M-(NSiR.sub.3).sub.2 in a 2:1 ratio in a hydrocarbon solvent at between -20.degree. and +30.degree. C. and for between about 0.01 and 2 hr, or
(2) MR.sub.2 in a 2:1 ratio in a hydrocarbon solvent at between about -20.degree. and +30.degree. C. and for between about 0.01 and 2 hr, or
(3) M(R.sup.1).sub.2 or M(NSiR.sub.3).sub.2 wherein R.sup.1 is independently selected from amide or R as defined hereinabove in a 1:1 ratio in a hydrocarbon solvent at between about -20.degree. and +30.degree. C. and for between about 0.01 and 2 hr, or
(4) M(R.sup.1).sub.2 or M(NSiR.sub.3).sub.2 wherein R.sup.1 is independently selected from amide or R as defined hereinabove in a 1:1 ratio in a hydrocarbon solvent at between about -20.degree. and +30.degree. C. and for between about 0.01 and 2 hr, followed by treatment with one equivalent of H--Q'--Y'--(SiR'.sub.3).sub.3, where Q', Y' and R' are defined above, in a hydrocarbon solvent at between about -20.degree. and +30.degree. C. for between about 0.01 and 2 hr;
(D) recovering the metalloorganic compound of structure (I), where L is nothing;
and
(E) optionally contacting the product of step (D) with ligand L to produce the organometallic compound where L is a Lewis base.

20 more elements

Dependencies are inferred from the claim text.

Single-source metalloorganic precursors to produce II/VI materials

Life of this patent

Single-source metalloorganic precursors to produce II/VI materials

Life of this patent

Abstract

Claims21