US 5,156,827 AGranted

Apparatus, process, and composition for in-situ generation of polyhydridic compounds of group IV-VI elements

AssigneeAdvanced Technology Materials, Inc.

InventorsGlenn M. Tom, James V. McManus

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Abstract

A system for generating a gaseous polyhydridic Group IV-VI compound, comprising a vessel containing a solid precursor metal compound for the polyhydridic Group IV-VI compound, and a source of a fluid-phase protonic activator compound reactive with the precursor compound to yield as reaction product (a) the polyhydridic compound and (b) a solid reaction product compound containing the metal moiety, e.g., a non-volatile metal salt, together with means for flowing the activator compound from the source thereof to the vessel containing the solid precursor compound. The precursor compound may suitably comprise a metal moiety such as lithium, sodium, magnesium, zinc, potassium, aluminum, and intermetallic complexes and alloys thereof. In a preferred aspect, wherein arsine is generated, the precursor compound may suitably comprise a metal arsenide, and the protonic activator compound is water or an acid such as hydrogen chloride. An appertaining method of generating such polyhydridic Group IV-VI compounds is likewise disclosed, together with a reaction vessel for carrying out the contacting of precursor and activator therein. Various precursor compositions, including various support materials, are discribed. The gas generating system of the invention obviates the need for large inventories of high pressure gas cylinders in semiconductor manufacturing operations, and produces the desired Group IV-VI hydride compound in situ on demand in a safe and controllable fashion.

Claims23

Dependent claims

A system for generating, in situ, on demand, and at a selected delivery rate, a gaseous polyhydridic compound of the formula:

GH.sub.n
wherein:
n is a number having a value of 2 to 4, inclusive;
and
G is an n-valent Group IV-VI element,
said system comprising:
(i) a reaction vessel containing a composition comprising a solid precursor compound for said polyhydridic compound, of the formula:
M.sub.x G.sub.y H.sub.z,
wherein:
M is a metal moiety selected from the group consisting of lithium, sodium, magnesium, zinc, potassium, aluminum, and intermetallic complexes and alloys thereof;
x is a number having a value of from 1 to 3, inclusive;
y is a number having a value of from 1 to 2, inclusive;
and
z is a number having a value of from 0 to 4, inclusive;
and
wherein said solid precursor compound is dispersed on an inert support;
(ii) a source of fluid-phase protonic activator compound which is reactive with said precursor compound to yield a reaction product comprising (a) said polyhydridic compound, and (b) a solid reaction product compound containing said metal moiety M;
(iii) means for flowing said activator compound from said source thereof to said reaction vessel containing the solid precursor compound, for reaction of the activator compound with the solid precursor compound to form the polyhydridic compound in said reaction vessel;
(iv) means for controllably adjusting the rate of flow of said activator compound in said flowing means (iii);
(v) means for discharging the polyhydridic compound from said reaction vessel;
and
(vi) means for sensing a process conditions correlative to the rate of production of polyhydridic compound in said reaction vessel and responsively thereto actuating said controllably adjusting means (iv) to adjust the rate of flow of the activator compound in said flowing means to maintain a selected rate of production of polyhydridic compound in said reaction vessel.

19 more elements

A method of generating, in situ, on demand, and at a selected delivery rate, a gaseous polyhydridic compound of the formula:

GH.sub.n
wherein:
n is an integer having a value of 2 to 4, inclusive, and
G is an n-valent Group IV-VI element;
comprising:
providing a reaction vessel containing a solid precursor compound for said polyhydridic compound, of the formula:
M.sub.x G.sub.y H.sub.z,
wherein:
M is a metal moiety selected from the group consisting of lithium, sodium, magnesium, zinc, potassium, aluminum, and intermetallic complexes and alloys thereof;
x is a number having a value of 1 to 3, inclusive;
y is a number having a value of from 1 to 2, inclusive;
and
z is a number having a value of from 0 to 4, inclusive;
and wherein said solid precursor compound is dispersed on an inert support;
flowing a fluid-phase protonic activator compound into said vessel for reaction of the activator compound with the solid precursor compound therein, to yield a reaction product comprising (i) said polyhydridic compound, and (ii) a solid reaction product compound containing said metal moiety M;
sensing a process condition correlative with the rate of production of polyhydridic compound in the reaction vessel;
responsively to the process condition sensing, adjusting the rate of flow of activator compound into the reaction vessel to maintain a selected rate of production of polyhydridic compound in said reaction vessel;
and
discharging gas comprising the polyhydridic compound from the reaction vessel at the selected delivery rate corresponding to the selected rate of production of polyhydridic compound in the reaction vessel.

16 more elements

Dependencies are inferred from the claim text.

Facts

Application: 07/323,311Filed 14 Mar 1989
Granted: 20 Oct 1992
Term ends: Not estimatedThe source records don’t support an estimate.

Classification13 codes

C23C 16/4488
Characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials: by in situ…
B01J 8/0278
With stationary particles, e.g. in fixed beds: feeding reactive fluids
C01B 6/00
Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic
C01B 6/065
Hydrides of aluminium, gallium, indium, thallium, germanium, tin, lead, arsenic, antimony, bismuth or polonium; Monoborane; Diborane; Addition…:…