Method of making titania-doped fused silica
AssigneeCorning Incorporated
InventorsJeffery L. Blackwell, Carlton M. Truesdale
Life of this patent
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Abstract
This invention relates to production of high purity fused silica glass doped with titania through oxidation or flame hydrolysis of a gaseous mixture and containing rutile crystals comprising a vaporizable, silicon-containing compound. Titanium-2-ethylhexyloxide, titanium cyclopentyloxide, and a titanium amide, or a combination thereof, constitute the operable titanium-containing compounds.
Claims15
In a method for making a non-porous body of high purity fused silica glass doped with titania comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 and a titanium-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to TiO.sub.2;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 doped with TiO.sub.2 and containing submicroscopic crystals of rutile and anatase with rutile being the predominant crystal phase;
- (c) depositing said amorphous particles onto a support;
- and
- (d) either essentially simultaneously with said deposition or subsequently thereto consolidating said deposit of amorphous particles into a non-porous body;
- the improvement comprising utilizing as said titanium-containing compound in vapor form a halide-free, titanium-containing compound selected from the group consisting of titanium-2-ethylhexyloxide, titanium cyclopentyloxide, and a titanium amide, or a combination thereof, whereby no halide-containing vapors are emitted from said titanium-containing compound during the making of said porous body.
In a method for making optical waveguide fibers of high purity fused silica glass doped with titania comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through heat treatment with oxidation or flame hydrolysis to SiO.sub.2 and a titanium-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to TiO.sub.2;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 doped with TiO.sub.2 and containing submicroscopic crystals of rutile and anatase with rutile being the predominant crystal phase;
- (c) depositing said amorphous particles onto a mandrel;
- (d) consolidating said deposit of amorphous particles into a non-porous, transparent glass body;
- and
- (e) drawing waveguide fiber from said body;
- the improvement comprising utilizing as said titanium-containing compound in vapor form a halide-free, titanium-containing compound selected from the group consisting of titanium-2-ethylhexyloxide, titanium cyclopentyloxide, and a titanium amide, or a combination thereof, whereby no halide-containing vapors are emitted from said titania-containing compound during the making of said optical waveguide fibers.
In a method for making optical waveguide fibers of high purity fused silica glass doped with titania comprising steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through heat treatment with oxidation or flame hydrolysis to SiO.sub.2 and a titanium-containing compound in vapor form capable of being converted through thermal decomposition with oxidation of flame hydrolysis to TiO.sub.2;
- (b) passing said gas stream into a flame of a combustion burner to form amorphous particles of fused SiO.sub.2 doped with TiO.sub.2 and containing submicroscopic crystals of rutile and anatase with rutile being the redominant crystal phase;
- (c) depositing said amorphous particles onto the surface of a bait tube;
- (d) consolidating said amorphous particles into a non-porous, transparent glass body;
- and
- (e) drawing waveguide fiber from said body;
- the improvement comprising utilizing as said titanium-containing compound in vapor form a halide-free, titanium-containing compound selected from the group consisting of titanium-2-ethylhexyloxide, titanium cyclopentyloxide, and a titanium amide, or a combination thereof, whereby no halide-containing vapors are emitted from said titanium-containing compound during the making of said optical waveguide fibers.
Dependencies are inferred from the claim text.