Laminated piezoelectric structure and process of forming the same
AssigneeAtochem North America, Inc.
InventorsJoseph V. Chatigny, Kumar Ogale, Lewis F. Brown, Joseph F. Yaskowski
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Abstract
A method of forming a laminated piezoelectric structure is disclosed wherein a plurality of polarized piezoelectric films of vinylidene fluoride and trifluoroethylene are solvent welded together. The solvent welding solution comprises a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent. The transducers produced from such a laminated structure are also disclosed.
Claims85
A process of forming a laminated piezoelectric structure, comprising the steps of:
- (a) providing a plurality of polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene;
- (b) interposing between and in surface contact with said films a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent;
- and
- (c) evaporating substantially all of the solvent of said solution thereby laminating said piezoelectric films.
A process of forming a laminated piezoelectric transducer, comprising the steps of:
- (a) providing a plurality of polarized piezoelectric films comprising a copolymer of about 60 to about 95 mole percent vinylidene fluoride and about 5 to about 40 mole percent trifluoroethylene;
- (b) interposing between and in surface contact with said films a solution comprising a copolymer of about 60 to about 95 mole percent vinylidene fluoride and about 5 to about 40 mole percent trifluoroethylene;
- (c) evaporating under an elevated temperature and pressure substantially all of the solvent thereby laminating said piezoelectric films;
- (d) applying an electroconductive layer over the exposed major surface of one of the outermost piezoelectric films;
- and
- (e) applying an additional electroconductive layer over the exposed major surface of the other of the outermost piezoelectric films.
A piezoelectric transducer, comprising:
- a plurality of stacked polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and a pair of electrodes sandwiched around the laminated stack of polarized piezoelectric films.
A hydrophone, comprising:
- a plurality of transducers comprising
- a plurality of stacked polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and
- a pair of electrodes sandwiched around the laminated stack of polarized piezoelectric films;
- and means for electrically coupling the electrodes of said transducers to form a plurality of interconnected transducers.
A process of forming a laminated piezoelectric transducer, comprising the steps of:
- (a) applying an adhesive layer to the outer surface of an electroconductive conduit, said adhesive layer is selected to allow for electrical conduction between said conduit and a subsequently applied polarized piezoelectric film;
- (b) applying a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent to one major face of a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene;
- (c) wrapping said polarized piezoelectric film around said conduit so that said major face containing said solution faces said conduit;
- (d) evaporating substantially all of the solvent of said solution thereby laminating adjacent turns of said polarized piezoelectric film;
- and
- (e) applying an electroconductive layer over the exposed outer surface of said polarized piezoelectric film.
A piezoelectric transducer, comprising
- a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene scrolled around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said piezoelectric film, and wherein adjacent turns of the scrolled polarized piezoelectric film are laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent;
- and
- an electroconductive layer disposed over the exposed outer surface of said polarized piezoelectric film.
A hydrophone, comprising:
- a plurality of transducers comprising
- a polarized piezoelectric film comprising
- a copolymer of vinylidene fluoride and trifluoroethylene scrolled around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said piezoelectric film and wherein adjacent turns of the scrolled polarized piezoelectric film are laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and
- an electroconductive layer disposed over the exposed outer surface of said polarized piezoelectric film;
- and
- means for electrically coupling the electroconductive conduits and said electroconductive layers to form a plurality of interconnected transducers.
A process of forming a laminated piezoelectric transducer, comprising the steps of:
- (a) applying an adhesive layer to the outer surface of an electroconductive conduit, said adhesive layer is selected to allow for electrical conduction between said conduit and a subsequently applied polarized piezoelectric ribbon;
- (b) spirally wrapping a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene around said conduit;
- (c) applying a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent to one major face of an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene;
- (d) spirally wrapping the additional polarized piezoelectric ribbon around said conduit so that said major face containing said solution contacts said first polarized piezoelectric ribbon;
- (e) evaporating substantially all of the solvent of said solution thereby laminating said polarized piezoelectric ribbons;
- and
- (f) applying an electroconductive layer over the exposed surface of the outermost polarized piezoelectric ribbon.
A piezoelectric transducer, comprising:
- a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said first polarized piezoelectric ribbon;
- an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around said conduit and laminated to said first polarized piezoelectric ribbon with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent;
- and
- an electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric ribbon.
A hydrophone, comprising:
- a plurality of transducers comprising
- a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said first polarized piezoelectric ribbon;
- an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around said conduit and laminated to said first polarized piezoelectric ribbon with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent;
- and
- an electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric ribbon;
- and
- means for electrically coupling the electroconductive conduits and said electroconductive layers to form a plurality of interconnected transducers.
A process of forming a piezoelectric transducer on a semiconductor substrate, comprising the steps of:
- (a) coating a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over a first surface of said semiconductor substrate, said semiconductor substrate having an electroconductive layer disposed over a second surface substantially opposed to said first surface;
- and
- (b) applying an electrical field across said electroconductive layer and said copolymer layer to polarize said copolymer layer.
A process of forming a laminated piezoelectric transducer on a semiconductor substrate, comprising the steps of:
- (a) forming an electroconductive layer over a surface of a semiconductor substrate;
- (b) coating a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over said electroconductive layer;
- (c) applying an electrical field across said electroconductive layer and said copolymer layer to polarize said copolymer layer;
- (d) providing a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene;
- (e) interposing between and in surface contact with said polarized copolymer layer and said polarized piezoelectric film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent;
- (f) evaporating substantially all of the solvent of said solution thereby laminating said polarized copolymer layer and said polarized piezoelectric film;
- and
- (g) applying an additional electroconductive layer over the exposed surface of said copolymer film.
A piezoelectric transducer, comprising:
- a first polarized piezoelectric layer comprising a copolymer of vinylidene fluoride and trifluoroethylene disposed over a semiconductor substrate having a first electroconductive layer;
- an additional polarized piezoelectric layer laminated to said first polarized piezoelectric layer with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent;
- and
- an additional electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric layer.
A process of forming a piezoelectric transducer on a semiconductor substrate, comprising the steps of:
- (a) forming a first electroconductive layer over at least a portion of a first surface of said semiconductor substrate;
- (b) forming a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over the first electroconductive layer;
- and
- (c) applying an electrical field across said semiconductor substrate and said copolymer layer to polarize said copolymer layer.
Dependencies are inferred from the claim text.