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US 5,153,494 AGranted
Ultrafast electro-dynamic X, Y and Theta Positioning Stage
AssigneeInternational Business Machines Corporation
InventorRalph L. Hollis, Jr.
Life of this patent
Estimating the term…
Abstract
The invention discloses an Ultrafast Electro-Dynamic X, Y and Theta Positioning Stage. A positioning stage made according to this invention allows light payloads to be moved with extremely high linear and angular accelerations over finite distances and angles with a plane. An important feature of this invention is a momentum-cancelling design which allows reaction forces and torques on the fixed member to approach zero, thereby, allowing for a smooth and an ultrafast performance by the positioning stage.
Claims50
A precision positioning stage capable of executing multi-dimensional planar motion comprising:
- a) at least one fixed assembly, said fixed assembly comprising at least a first part and at least a second part, said first and said second part having at least one magnet secured thereto, such that at least a portion of said magnets are close enough to magnetically influence at least a portion of at least one first moving element, and wherein said first and said second part are on the opposite sides of said at least one first moving element,
- b) said at least one first moving element has at least one coil that can be electrically energized, and wherein said at least one first moving element is not physically connected to said fixed assembly, and wherein said fixed assembly has means for making said at least one first moving element float within said fixed assembly, wherein said at least one first moving element moves with respect to said fixed assembly at high speed when electrically energized, and wherein the momentum of said moving element is instantaneously opposed to prevent momentum from being transferred to said fixed assembly, thereby providing said precision positioning stage.
A precision positioning stage capable of executing multi-dimensional planar motion comprising:
- a) a first fixed assembly, said first fixed assembly having at least one magnet secured thereto, such that at least a portion of said magnet is close enough to magnetically influence at least a portion of at least one first moving element,
- b) said at least one first moving element has at least one coil that can be electrically energized,
- c) at least one second fixed assembly, said first moving element being contained within said first and said second fixed assemblies, said second fixed assembly having at least one magnet secured thereto, such that at least a portion of said magnet is close enough to magnetically influence at least a portion of said at least one first moving element and at least a portion of at least one second moving element,
- d) said at least one second moving element has at least one coil that can be electrically energized,
- e) a third fixed assembly, such that said second moving element is contained within said second and said third fixed assemblies, said third fixed assembly having at least one magnet secured thereto, such that at least a portion of said magnet is close enough to magnetically influence at least a portion of said at least one second moving element, said first and second moving elements are not physically connected to any of said assemblies, and wherein at least two of said fixed assemblies have means for making said first and said second moving elements float within said fixed assemblies, and wherein said first moving element moves in a momentum cancelling manner with respect to said second moving element when said coils are electrically energized.
2 more elements
A precision positioning stage capable of executing multi-dimensional planar motion comprising:
- a) a first fixed assembly, said first fixed assembly having at least one magnet secured thereto, such that at least a portion of said magnet is close enough to magnetically influence at least a portion of at least one first moving element,
- b) said at least one first moving element has at least one coil that can be electrically energized,
- c) at least one second moving element, said at least one second moving element has at least one coil that can be electrically energized,
- d) a second fixed assembly, such that said first and said second moving elements are contained within said first and said second fixed assemblies, said second fixed assembly has at least one magnet secured thereto, such that at least a portion of said magnet is close enough to magnetically influence at least a portion of said at least one second moving element, said first and second moving elements are not physically connected to any of said assemblies, and wherein at least two of said fixed assemblies have means for making said first and said second moving elements float within said fixed assemblies, and wherein said first moving element moves in a momentum cancelling manner with respect to said second moving element when said coils are electrically energized.
1 more element
Dependencies are inferred from the claim text.