Microwave source
AssigneeApplied Science and Technology, Inc.
InventorDonald K. Smith
Life of this patent
Estimating the term…
Abstract
A microwave coupling device for generating a microwave field in a circular waveguide for energizing a material including a rectangular input waveguide for carrying microwave energy from a microwave source, a circular output waveguide, and a device for coupling the microwave energy from the input waveguide to the output waveguide for generating in the output waveguide the microwave field. Further included is structure for permitting external monitoring through the output waveguide of the material being energized.
Claims29
A microwave coupling device for generating a microwave field in a circular waveguide for energizing a material, comprising:
- a rectangular input waveguide for carrying microwave energy from a microwave source;
- a circular output waveguide;
- means for coupling said microwave energy from said input waveguide to said output waveguide for generating in said output waveguide said microwave field;
- and
- an annular tube coupled to an opening in said input waveguide for permitting external monitoring of the inside of said output waveguide.
A microwave source for generating a circular axisymmetric microwave field for axisymmetrically energizing a material, comprising:
- a rectangular input waveguide;
- means for introducing a microwave source into said input waveguide;
- a circular output waveguide;
- means for connecting said input waveguide to said output waveguide;
- a rod assembly passing through said input waveguide coaxially into said output waveguide and ending in said output waveguide for generating in said output waveguide from said microwave source said circular axisymmetric microwave field;
- and
- tuning means in said input waveguide for altering said microwave field to substantially match the load impedance for efficiently coupling the microwave energy to said material.
A microwave plasma generator, comprising:
- a waveguide apparatus including a rectangular input waveguide coupled to a circular output waveguide;
- means for introducing a microwave source into said input waveguide;
- a probe assembly passing through said input waveguide into said output waveguide and ending in said output waveguide for generating form said source in said output waveguide a microwave field;
- means in said waveguide apparatus for tuning said field to substantially match the load impedance;
- a vacuum chamber for containing a gas to be energized to form said plasma;
- means for introducing said gas into said vacuum chamber;
- and
- means for coupling said field to said gas for energizing said gas to form said plasma.
Dependencies are inferred from the claim text.