Structure and method for enhancing adhesion to a polyimide surface
AssigneeInternational Business Machines Corporation
InventorKang-Wook Lee
Life of this patent
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Abstract
The surface of a substrate made of substantially crystalline polyimide is converted to form a layer of substantially amorphous polyimide. The substantially amorphous layer is formed by treating the crystalline polimide surface with a base followed by treatment with an acid to form a polyamic acid layer, which is reimidized to form a substantially amorphous layer by a low temperature heat cycle. Metals or polyimides can be deposited onto this amorphous layer, which is then cured to convert the amorphous layer to substantially crystalline polyimide. This process enhances the adhesion of the metal or polyimide layer without introducing contamination (new foreign materials or new functional groups) from surface treatments of adhesion layers.
Claims14
A process for forming a layer of substantially amorphous polyimide on at least part of the surface of a substantially crystalline polyimide article for subsequent coating of said article followed by recrystallizing said amorphous polyimide comprising:
- treating at least a part of the surface of said substantially crystalline polyimide article with a base;
- washing said base treated surface;
- treating at least part of the surface of said substantially crystalline polyimide article with an acid to convert said treated substantially crystalline polyimide to polyamic acid;
- heating said acid treated article to imidize said polyamic acid, thereby forming on said at least part of the surface a layer of amorphous polyimide.
A process for improving the adhesion of metals to the surface of a substantially crystalline polyimide article comprising:
- treating at least a part of the surface of said substantially crystalline polyimide article with a base;
- washing said base treated surface;
- treating at least part of the surface of said substantially crystalline polyimide article with an acid to convert said treated substantially crystalline polyimide to polyamic acid;
- heating said acid treated article to imidize said polyamic acid, thereby forming on said at least part of the surface a layer of amorphous polyimide;
- coating said layer of amorphous polyimide with a metal;
- and
- curing said article to convert said substantially amorphous polyimide to substantially crystalline polyimide.
A process for improving the adhesion of polyimides to the surface of a substantially crystalline polyimide article comprising:
- treating at least a part of the surface of said substantially crystalline polyimide article with a base;
- washing said base treated surface;
- treating at least part of the surface of said substantially crystalline polyimide article with an acid to convert said treated substantially crystalline polyimide to polyamic acid;
- heating said acid treated article to imidize said polyamic acid, thereby forming on said at least part of the surface a layer of amorphous polyimide;
- coating said layer of amorphous polyimide with a polyimide;
- and
- curing said article to convert said substantially amorphous polyimide to substantially crystalline polyimide.
Dependencies are inferred from the claim text.