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AssigneeU.S. Philips Corporation
InventorsDominicus J. Franken, Fransiscus M. Jacobs, Johannes M. M. Van Kimmenade, Cornelis D. Van Dijk, Jan Van Eljk
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A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation system (1, 13) is displaceable, and by a support member (35), over which the object table (21) is guided by means of an aerostatic foot (31). In an operational position, the unit (65) is coupled to a carrier (67) by means of coupling members (73), the carrier (67) being suspended from the mounting member (5) by means of suspension elements (79, 81, 83), so that the unit (65) is arranged between lower frame supports (25) of the frame (7) and a compact construction is obtained. The unit (65) can be rotated from the operational position to an end position, in which the unit (65) is entirely outside the frame (7) and is easily accessible for maintenance, by means of a rotation mechanism (87) and a swivel mechanism (89). The lithographic device can be used inter alia for irradiating semiconductor substrates, a semiconductor pattern provided on a mask (11) being imaged on a semiconductor substrate (19) provided on the object table (21) by means of the irradiation system (1, 13).
A lithographic device comprising a lithograpic irradiation system which has a vertical main axis parallel to a z-direction and is fastened near a lower side to a mounting member belonging to a frame of the device, and comprising a positioning device which is arranged below the irradiation system and by means of which an object table is displaceable relative to the irradiation system over a guide surface of a support member coupled to the positioning device, which guide surface extends perpendicular to the z-direction, characterized in that the positioning device and the support member are positioned as a unit on a carrier which is suspended from the mounting member.
A lithographic device as claimed in any one of the preceding claims, characterized in that the unit formed by the support member and the positioning device is displaceable in a direction transverse to the main axis relative to the carrier and the mounting member.
A lithographic device as claimed in any one of the preceding claims, characterized in that the unit formed by the support member and the positioning device is rotatable relative to the carrier and the mounting member about an axis of rotation which is directed substantially parallel to the main axis.
Dependencies are inferred from the claim text.