Two-color radiation detector array and methods of fabricating same
AssigneeSanta Barbara Research Center
InventorPaul R. Norton
Life of this patent
Estimating the term…
Loading patent…
AssigneeSanta Barbara Research Center
InventorPaul R. Norton
Estimating the term…
Methods of fabricating a two-color infrared detector array, and an array of same fabricated by the methods. There is disclosed (a) selectively forming a plurality of first regions upon or within a surface of a substrate, the first regions being comprised of a first semiconductor material having a first type of electrical conductivity and a significant responsivity to wavelengths within a first spectral band. A second step (b) forms a substantially continuous layer comprised of a second semiconductor material over the surface of the substrate and over the plurality of first regions, the layer being comprised of semiconductor material having a second type of electrical conductivity for forming a plurality of first heterojunctions with the first regions. A third step (c) selectively forms a plurality of second regions upon the layer, individual ones of which are in registration with a corresponding one of the first regions. The second regions are comprised of a semiconductor material having the first type of electrical conductivity for forming a plurality of second heterojunctions with the underlying layer and a significant responsivity to wavelengths within a spectral band that does not significantly overlap the first spectral band.
A method of fabricating an array of semiconductor radiation detectors, comprising the steps of:
An array of radiation detectors each of which is responsive to electromagnetic radiation within a plurality of spectral bands, comprising:
Dependencies are inferred from the claim text.