Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
AssigneeSRI International
InventorAngel Sanjurjo
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AssigneeSRI International
InventorAngel Sanjurjo
Estimating the term…
A low temperature process is described for forming a coating or powder comprising one or more metals or metal compounds by first reacting one or more metal reactants with a halide-containing reactant to form one or more reactive intermediates capable of reacting, disproportionating, or decomposing to form a coating or powder comprising the one or more metal reactants. When one or more metal compounds are formed, either as powders or as coatings, a third reactant may be injected into a second reaction zone in the reactor to contact the one or more reactive intermediates formed in the first reaction zone to thereby form one or more metal compounds such as metal nitrides, carbides, oxides, borides, or mixtures of same.
A low temperature process for forming a powder comprising one or more metals compounds which comprises:
A low temperature process for forming a powder comprising one or more metal compounds which comprises:
A low temperature process for forming silicon nitride which comprises:
Dependencies are inferred from the claim text.