Apparatus for testing integrated circuits

Apparatus for testing integrated circuit chips comprising:

• a fixture mounting member having test circuitry connections,
• an elastomeric member connected to said mounting member and having a plurality of connector elements thereon,
• said elements being electrically connected to said test circuitry connections,
• a probe including:
• a probe body having first and second sides,
• probe contact elements on said first probe side,
• probe connector pads on said second probe side, and electrically connected to said probe contact elements, and
• cooperating means on said fixture mounting member and probe for detachably mechanically interconnecting said probe to said fixture mounting member in a probe operational position, said probe connector pads in said operational position of said probe being in firm electrical contact with said connector elements of said elastomeric member.

Apparatus for testing integrated circuit chips comprising:

• a fixture mounting plate having test circuitry connections,
• a gas chamber housing mounted to said fixture mounting plate,
• an annular circuit board carried by said fixture mounting plate and having an internal aperture receiving a portion of said gas chamber housing, said circuit board having a plurality of electrical conductors,
• an annular elastomeric member carried by said circuit board and having elastomeric member connector elements connected to said circuit board electrical conductors,
• a probe including:
• a flexible probe body having first and second sides,
• probe contact elements on said first probe side, and
• probe connector pads on said second probe side electrically connected to said probe contact elements, said probe connector pads being in contact with and pressing against said elastomeric member connector elements,
• vacuum means extending into said gas chamber housing having a vacuum aperture adjacent said probe body for attaching said probe body to said mounting plate and circuit board with said probe connector pads in contact with and pressed against said elastomeric member connector elements,
• said gas chamber housing having an opening in contact with said second probe side, and
• means for introducing gas under pressure into said gas chamber housing to press said probe body away from said gas chamber housing.