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US 5,145,099 AGranted
Method for combining die attach and lead bond in the assembly of a semiconductor package
AssigneeMicron Technology, Inc.
InventorsAlan G. Wood, Warren M. Farnworth, George P. McGill
Life of this patent
Estimating the term…
Abstract
An improved system for the production of semiconductor devices is described. The invention incorporates conventional die attach and lead bond means into a simplified, common machine system. An independently mounted, computer-controlled, television camera system observes, monitors, and controls the operational steps of the die attach-lead bond process using a close loop process. The invention serves to increase throughout and yields while reducing variation of the finished product.
Claims9
A unified and automatically controlled semiconductor device assembly and inspection system, said system comprising:
- a) an existing automated material transport and work holding means, automated die attach means and automated lead bonding means, appropriately and operably and fixedly attached to each other on a common supporting frame means in such a way as to unify and coordinate, in a controlled and continuous manner, mechanical and electrical operations between said material transport and work holding means, said die attach means and said lead bonding means during assembly of said semiconductor devices;
- b) said material transport and work holding means being of known design to provide common reference means for positional placement of said devices throughout said die attach and lead bonding operations and final inspection of said completed devices;
- c) a common material position indexing means of known design, operably attachable to said common material transport and work holding means, in a known way, to enable precise and accurate positioning and placement of said semiconductor devices during their assembly and inspection;
- d) an automated vision control means operably and independently attached to said die attach means in such a way as to observe and control said die attach operation;
- e) an automated vision control means operably and independently attached to said lead bonding means in such a manner as to observe and control said lead bond operation and validate said previous die attach operation;
- f) automated vision control means operably and independently attached to said assembly system in such a way as to observe and control completely assembled semiconductor devices;
- and
- g) all of said automated vision control means operably interconnected to each other in such a manner as simultaneously to collect, store, coordinate and utilize all information received by each of said vision control means in order to validate all assembly operations and control, precisely and accurately, the assembly of said semiconductor devices.
5 more elements
A unified and automatically controlled semiconductor device assembly and inspection system, said system comprising:
- a) an existing automated leadframe die attach equipment and automated wire bonder operably attached to each other in such a way as to unify and coordinate mechanical and electrical operations between said die attach equipment and said wire bonder during assembly of semiconductor devices;
- b) a common lead frame transport means of known design operably and fixedly attached to and between said die attach equipment and said wire bonder in such a way as to support and move said semiconductor devices in a controlled and continuous manner and serving to provide common reference for positional placement of said devices throughout said die attach and wirebond operations and final inspection of said completed devices;
- c) a common lead frame position indexing means of known design operably attachable to said common lead frame transport means in a known manner to enable precise and accurate positioning and placement of said semiconductor devices during their assembly and inspection;
- d) an automated vision control means operably and independently attachable to said die attach equipment in such a manner as to observe and control said die attach operation;
- e) an automated vision control means operably and independently attached to said wire bonder in such a manner as to observe and control said wire bond operation and validate said previous die attach operation;
- f) automated vision control means operably and independently attached to said assembly system in such a manner as to observe and control completely assembled semiconductor devices;
- and
- g) all of said automated vision control means operably interconnected to each other in such a manner as simultaneously to collect, store, coordinate and utilize all information received by each of said vision control means in order to validate all assembly operations and control, precisely and accurately, the assembly of said semiconductor devices.
5 more elements
Dependencies are inferred from the claim text.