Soluble calixarene derivative and films thereof
AssigneeNEC Corporation
InventorNaoko Mita
Life of this patent
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Abstract
A novel calixarene derivative, viz. acetylated methyl-calix[n]arene (n is from 4 to 8), exhibits high solubilities in various organic solvents. A film of this compound can easily be formed by a conventional solution coating method such as spin coating, and the obtained film is hard and heat-resistant. A pattern of negative type can be formed in the obtained film by selectively irradiating the film with a high-energy ray such as ion beam, electron beam or X-ray to polymerize and insolubilize the irradiated regions and then removing the unirradiated region by dissolution in an organic solvent.
Claims10
A film of acetylated methyl-calix[n]arene represented by the formula (I):
- ##STR3## where n is an integer from 4 to 8, the film being thicker than 10 nm and formed from a solution of said acetylated methyl-calix[n]arene in an organic solvent by applying said solution directly to a substrate and thereafter removing said solvent.
A method of forming a pattern, comprising the steps of:
- (a) forming a film of acetylated methyl-calix[n]arene represented by the formula (I) thicker than 10 nm on a substrate from a solution of said acetylated methyl-calix[n]arene by applying said solution directly to a substrate and thereafter removing said solvent;
- (b) selectively irradiating said film with a high-energy ray thereby to insolubilize the irradiated regions of said film;
- and
- (c) removing the unirradiated regions of said film by dissolving in an organic solvent;
- ##STR4## where n is an integer from 4 to 8.
A method of forming a film of acetylated methylcalix[n]arene represented by the formula (I) thicker than 10nm, ##STR5## where n is an integer from 4 to 8, comprising the steps of:
- applying a solution of said acetylated methyl-calix[n]arene in an organic solvent directly to a substrate to thereby form a liquid film on the substrate and removing said solvent from said liquid film.
Dependencies are inferred from the claim text.