Cold cathode field emission device with integral emitter ballasting
OwnerRobert C. Kaneinventor
Life of this patent
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Abstract
A cold cathode field emission device that includes a ballast resistor (202, 303, 402) integrally formed therewith and coupled to the emitter (204, 302, 403) to allow appropriate compensation for manufacturing and performance variations in field emission from the attached emitter.
Claims9
A cold-cathode field emission device having an anode, an emitter, and a ballast resistor formed integrally therewith and coupled to the emitter.
An electronic device having a plurality of cold-cathode field emission devices, each of these devices having an anode, an emitter, and a ballast resistor formed integrally therewith and coupled to the emitter.
A method of forming a cold-cathode field emission device having a ballast resistor coupled to an emitter thereof, comprising the steps of:
- A) providing a semiconductor substrate;
- B) forming the ballast resistor by selectively diffusing impurities in at least a part of the semiconductor substrate;
- C) forming at least part of the cold-cathode field emission device on the semiconductor substrate such that an emitter thereof couples to the ballast resistor;
- D) forming an anode.
Dependencies are inferred from the claim text.