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US 5,140,774 AGranted
Apparatus for polishing hard disk substrates
AssigneeSystem Seiko Co., Ltd.
InventorMasami Onodera
Life of this patent
Estimating the term…
Abstract
An apparatus capable of simultaneously polishing a plurality of hard disk substrates at the same time includes at least three substrate carriers which are rotatably disposed on an index table and which carry and transfer a plurality of hard disk substrates, are moved successively through a substrate loading station, a substrate polishing station and a substrate removing station in response to intermittent rotation of the index table.
Claims6
An apparatus for polishing hard disk substrates, comprising:
- an index table intermittently rotatable about a first axis;
- and
- at least three substrate carriers each rotatably supported on the index table so as to be rotatable about a second axis, each of said substrate carriers being so constructed and arranged as to support a plurality of hard disk substrates,
- said index table being rotatable to move said substrate carriers successively through a substrate mounting station in which a plurality of hard disk substrates are mounted on said substrate carriers, a substrate polishing station in which a plurality of hard disk substrates supported on said substrate carriers are polished, and a substrate removing station in which a plurality of polished hard disk substrates are removed from said substrate carriers
1 more element
Dependencies are inferred from the claim text.