In-line detector system for real-time determination of impurity concentration in a flowing gas stream

An in-line detector system for sensing concentration of an impurity species in a flowing gas stream, said system comprising:

• a purifier unit for gas stream impurity removal;
• means defining a flow passage assembly having an inlet end and an outlet end, and constructed and arranged:
• for flowing at least a portion of gas from the flowing gas stream through the purifier unit to yield impurity-reduced gas;
• for flowing impurity-reduced gas to an impurity concentration sensing locus;
• for flowing unpurified gas from the flowing gas stream to an impurity concentration sensing locus;
• and
• for discharging the impurity-reduced gas and unpurified gas from the outlet end;
• and
• an upstream concentration sensor, a downstream concentration sensor, and the purifier unit interposed therebetween, disposed in the means defining the flow passage assembly such that the upstream sensor, purifier unit, and downstream sensor are in series relationship to one another.

An in-line detector system for sensing concentration of an impurity species in a flowing gas stream, said system comprising:

• a purifier unit for gas stream impurity removal;
• means defining a flow passage assembly having an inlet end and an outlet end, and constructed and arranged:
• for flowing at least a portion of gas from the flowing gas stream through the purifier unit to yield impurity-reduced gas;
• for flowing impurity-reduced gas to an impurity concentration sensing locus;
• for flowing unpurified gas from the flowing gas stream to an impurity concentration sensing locus;
• and
• for discharging the impurity-reduced gas and unpurified gas from the outlet end;
• wherein the means defining the flow path assembly comprise:
• (i) an inlet gas manifold having first and second ends;
• (ii) an inlet gas flow conduit joined to the inlet gas manifold intermediate the first and second thereof;
• (iii) an outlet gas manifold having first and second ends;
• (iv) a first branch conduit connecting the respective first ends of the inlet and out gas manifolds;
• (v) a second branch conduit connecting the respective second ends of the first and second gas manifolds;
• and
• (vi) an outlet gas conduit joined to the outlet gas manifold intermediate the first and second ends thereof;
• further comprising a first impurity concentration sensor disposed in the out gas manifold between the first end thereof and the junction of the outlet gas conduit with the outlet gas manifold;
• the purifier unit being positioned in the outlet gas manifold intermediate the first end thereof and the first gas impurity concentration sensor therein;
• and
• further comprising a second gas impurity concentration sensor in the gas outlet manifold intermediate the first end thereof and the junction of the outlet gas manifold with the outlet gas conduit.

An in-line detector system for real-time detection of impurity concentration in a flowing gas stream, comprising:

• a main flow conduit having inlet and outlet ends joinable in closed flow communication to the flowing gas stream for flow of the gas stream therethrough;
• a gas stream impurity sensor port jointed in outflow relationship to an outlet end portion of the main flow conduit;
• a purifier unit for gas stream impurity removal, joined in inflow relationship to an inlet end portion of the main flow conduit;
• a manifold (1l interconnecting the purifier unit in outflow relationship to the impurity sensor port, and (2) joined to the main flow conduit intermediate the junctures of the sensor port and purifier unit therewith;
• a switching valve disposed in the manifold and switchable between (i) a first position for effecting flow of gas through the manifold from the purifier unit to the sensor port, and (ii) a second position for effecting flow of gas through the manifold from the main flow conduit to the sensor port;
• and
• a first flow restrictor disposed in the main flow conduit upstream of and in proximity to the junction between the main flow conduit and the sensor port.

A method of sensing gas impurity concentration in a flowing gas stream, comprising:

• purifying at least a portion of the flowing gas stream to yield impurity-reduced gas;
• sensing gas impurity concentration of the impurity-reduced gas;
• sensing concentration of unpurified gas from the flowing gas stream;
• and
• discharging all gas which has been sensed for impurity concentration in the flowing gas stream,
• wherein the impurity concentration sensing locus for unpurified gas, and the impurity concentration sensing locus for impurity-reduced gas, comprise different loci.

A method of sensing gas impurity concentration in a flowing gas stream, comprising:

• purifying at least a portion of the flowing gas stream to yield impurity-reduced gas;
• sensing gas impurity concentration of the impurity-reduced gas;
• sensing concentration of unpurified gas from the flowing gas stream;
• and
• discharging all gas which has been sensed for impurity concentration in the flowing gas stream,
• wherein the flowing gas stream is passed, in series, through an upstream gas concentration sensor, a purifier unit, and a downstream concentration sensor.

A method of sensing gas impurity concentration in a flowing gas stream, comprising:

• providing an in-line detector system in closed flow communication with the flowing gas stream, said in-line detector system comprising:
• a main flow conduit having inlet and outlet ends joinable in closed flow communication to the flowing gas stream for flow of the gas stream therethrough;
• a gas stream impurity sensor port joined in outflow relationship to an inlet portion of the main flow conduit;
• a purifier unit for gas stream impurity removal, joined in inflow relationship to an inlet end portion of the main flow conduit;
• a manifold (1) interconnecting the purifier unit in outflow relationship to the impurity sensor port, and (2) joined to the main flow conduit intermediate the junctures of the sensor port and purifier unit therewith;
• a switching valve disposed in the manifold and switchable between (i) a first position for effecting flow of gas through the manifold from the purifier unit to the sensor port, and (ii) a second position for effecting flow of gas through the manifold from the main flow conduit to the sensor port;
• and
• a flow restrictor disposed in the main flow conduit upstream of and in proximity to the junction between the main flow conduit and the sensor port;
• passing gas from the flowing gas stream into the in-line detector system;
• sequentially switching said switching valve to flow gas from the flowing gas stream alternately through the manifold from the purifier unit to the sensor port, and through the manifold from the main flow conduit to the sensor port;
• sensing concentration of gas impurity in the gas at said sensor port;
• determining from the gas impurity concentration sensing at the sensor port a corrected concentration measurement for impurity concentration in the flowing gas stream;
• and
• discharging gas from the sensor port to the flowing gas stream.