Method and apparatus for non-contact measuring of object surfaces
AssigneeCarl-Zeiss-Stiftung
InventorMichael Kuchel
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AssigneeCarl-Zeiss-Stiftung
InventorMichael Kuchel
Estimating the term…
Two bar patterns are projected sequentially on the object (O) to be measured, e.g., by time-division multiplexing, at angles which are inclined toward each other. The bar patterns are produced by projectors having respective rectangular gratings. The periods of the gratings are the same, and the phase relationship of the gratings is fixed relative to each other. Each reflected bar pattern, as distorted by the surface of the object, is individually and sequentially recorded by a camera (K); and the bar phases (.psi..sub.1, .psi..sub.2) of each sequentially reflected bar pattern are calculated for each image point by a computer connected with the camera. The computer also computes the differences (.DELTA..psi.) between the bar phases of the two projections for each image point. These phase differences remain stationary even when the bar patterns are moved relative to the camera. A plurality of phase differences for each image point is stored, averaged, and then used to calculate the height measurement (z) for each image point for display on a television monitor (42).
In a method for the non-contact measurement of object surfaces by projecting bar patterns on the object surface, detecting reflections of said patterns with a video camera, and evaluating the camera images of said reflections with a computer to calculate height measurements for a plurality of points on said object surface, the improvement comprising the steps of:
In apparatus for the non-contact measurement of object surfaces, said apparatus having:
Dependencies are inferred from the claim text.