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US 5,134,261 AGranted
Apparatus and method for controlling gradients in radio frequency heating
AssigneeThe United States of America as represented by the Secretary of the Air Force
InventorsJohn J. Larkin, Meckie T. Harris, Alton F. Armington
Life of this patent
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Abstract
A composite susceptor for a radio frequency (RF) heated crystal growing furnace has a plurality of stacked electrically insulating and electrically conducting elements about the crucible area so that a proper temperature gradient is established and controlled.
Claims23
A composite susceptor for use in a radio frequency heated furnace, said composite susceptor comprising:
- at least one electrically insulating element, said insulating element having a cavity therethrough;
- and
- at least one electrically conducting element, said at least one conducting element generating heat as a function of radio frequency current in RF coils, said at least one conducting element being stacked with said at least one insulating element, said at least one conducting element having a cavity therethrough that coincides with said cavity of said at least one insulating element, said at least one electrically insulating element preventing heat generated by radio frequency waves, said at least one electrically insulating element modify temperature gradients in combination with said at least one conducting element, an object to be heated placed within the cavities of said at least one insulating and conducting elements.
A method of controlling the temperature gradients in an radio frequency (RF) heated furnace, said method comprising the steps of:
- positioning about a heating area having an object to be heated a plurality of electrically insulating and conducting elements, said elements having a cavity therethrough wherein the heating area is established, said elements being alternative stacked to form said cavity, and said conducting element generates heat as a function of radio frequency current in RF coils.
Dependencies are inferred from the claim text.