Heating apparatus
AssigneeTokyo Electron Sagami Limited
InventorSusumu Tanaka
Life of this patent
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Abstract
A heating apparatus comprising a refractory block in which coil heater is embedded, an inner metal cover located outside the refractory block, a water cooling pipe located outside the inner cover, an outer metal cover located outside the water cooling pipe, a terminal electrically connected to end of the coil heater and passed through the inner and outer covers, and a power supply electrically connected to the terminals to supply current to the coil heaters. Each of the terminals is fixed to the outer cover by insulating members but left free from the inner cover.
Claims14
A heating apparatus comprising:
- a refractory block member enclosing objects to be processed;
- a heating element which is embedded in said refractory block member and formed in a spring coiled shape, having a diameter less than the thickness of said refractory block member;
- an inner cover made of a metallic material and located outside said refractory block member;
- a cooling means located outside said inner cover;
- an outer cover made of a metallic material and located outside said cooling means;
- a terminal which is electrically connected to an end portion of said heating element for supplying electric power to said heating element, and which passes through said inner cover and said outer cover, said terminal being fixed to said outer cover through an insulating member and left free from said inner cover;
- and
- a power supply electrically connected to said terminal, and for supplying electric power to said heating element.
A vertical-type CVD apparatus comprising:
- a refractory block member embedded in a spring coil-shaped resistant heating element enclosing objects to be processed, said refractory block member having an opening at the lower end thereof;
- the coil diameter of said heating element being less than the thickness of said refractory block member;
- a process tube enclosed by said resistant heating element, keeping its longitudinal axis vertical;
- an inner cover made of a metallic material, and located outside said refractory block member;
- a cooling means located outside said inner cover;
- an outer cover made of a metallic material, and located outside said cooling means;
- a terminal which is electrically connected to an end portion of said heating element for supplying electric power to said heating element, and which passes through said inner cover and said outer cover, said terminal being fixed to said outer cover through an insulating member and left free from said inner cover;
- and
- a power supply electrically connected to said terminal, for supplying electric power to said heating element.
Dependencies are inferred from the claim text.