Method for evaluating a lithium niobate thin film and apparatus for preparing the same
AssigneeSharp Kabushiki Kaisha
InventorsHironori Matsunaga, Hirotaka Ohno, Yasunari Okamoto
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Abstract
A method for evaluating a lithium niobate thin film includes measuring an absorption edge wavelength of a lithium niobate thin film and evaluating a lithium-to-niobium composition ratio of the thin film, and an apparatus for preparing a thin film including a thin film-forming body capable of controlling the lithium-to-niobium composition ratio of a lithium niobate thin film being formed and an evaluation device for evaluating the lithium-to-niobium composition ratio, the evaluation device being provided with a monitor substrate, an optical path for spectrometry, an ultraviolet ray source and a measurement part for measuring an absorption edge wavelength of the thin film.
Claims14
An apparatus for forming a lithium niobate thin film comprising:
- a vacuum chamber at a predetermined pressure;
- a high frequency coil, located in said vacuum chamber;
- means for introducing oxygen gas into said vacuum chamber near said high frequency coil;
- said high frequency coil generating an oxygen plasma atmosphere by applying Rf power of a predetermined frequency and wattage to said high frequency coil;
- a substrate located within said vacuum chamber;
- means for heating said substrate to a predetermined temperature;
- evaporation means, operating at a predetermined current, for producing niobium vapor;
- means for producing lithium vapor;
- means for passing the lithium vapor and niobium vapor through the oxygen plasma atmosphere;
- means for simultaneously depositing the lithium vapor and niobium vapor on said substrate to form a lithium niobate thin film;
- means for measuring an absorption edge wavelength of the lithium niobate thin film;
- and
- means for controlling the predetermined pressure of said vacuum chamber, the predetermined frequency and wattage of the Rf power, the predetermined temperature of said substrate, the predetermined current of said evaporation means, a deposition rate of the lithium vapor and a deposition rate of the niobium vapor such that the absorption edge wavelength falls within a predetermined range.
A method for forming a lithium niobate thin film, comprising the steps of:
- (a) pressurizing a vacuum chamber at a predetermined pressure;
- (b) introducing oxygen gas into the vacuum chamber near a high frequency coil;
- (c) applying Rf power of a predetermined frequency and wattage to the high frequency coil to generate an oxygen plasma atmosphere;
- (d) heating a substrate to a predetermined temperature;
- (e) producing niobium vapor, utilizing an evaporator operating at a predetermined current;
- (f) producing lithium vapor;
- (g) passing the lithium vapor and niobium vapor thorough the oxygen plasma atmosphere;
- (h) simultaneously depositing the lithium vapor and niobium vapor on the substrate to form a lithium niobate thin film;
- (i) measuring an absorption edge wavelength of the lithium niobate thin film;
- and
- (j) controlling the predetermined pressure of the vacuum chamber, the predetermined frequency and wattage of the Rf power, the predetermined temperature of the substrate, the predetermined current of the evaporator, a deposition rate of the lithium vapor and a deposition rate of the niobium vapor such that the absorption edge wavelength falls within a predetermined range.
Dependencies are inferred from the claim text.