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US 5,121,256 AGranted
Lithography system employing a solid immersion lens
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsTimothy R. Corle, Gordon S. Kino, Scott M. Mansfield
Life of this patent
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Abstract
A lithography system employing a solid immersion lens having a spherical surface to enhance its resolution is disclosed.
Claims4
In a lithography system of the type which includes a lens system for imaging a mask onto a sample, the improvement comprising placing a solid immersion lens placed closely adjacent to the sample, said solid immersion lens being constructed of a material having a high refractive index and shaped with a spherical surface facing said lens system and a flat front surface adjacent to said sample.
Dependencies are inferred from the claim text.