Micro-machined switch and method of fabrication
AssigneeHughes Aircraft Company
InventorLawrence E. Larson
Life of this patent
Estimating the term…
Abstract
A miniature electrostatically actuated switch and process for fabricating it in which the switch is operable to connect and disconnect one or more transmission lines laid down on a dielectric substrate of an integrated circuit wafer. The switch is fabricated on the integrated circuit wafer using integrated circuit fabrication processes including thin films of conductive materials and photoresist and selective removal of these films. the switch includes a rotating switch blade which rotates about a hub formed on the dielectric substrate under the influence of electrostatic fields created by control pads and other switch elements formed on the dielectric substrate, whereupon a microwave signal can be switchably transmitted along the transmission line formed on the substrate.
Claims23
An electrostatically actuated miniature switch comprising:
- a substrate of dielectric material having a substantially planar surface;
- a transmission line for conducting an electrical signal deposited on said surface, said transmission line including a first and a second segment each separated from the other by a gap;
- a hub deposited on said surface;
- a switch blade of electrically conductive material deposited above said surface and being operable to rotate about said hub, said switch blade being dimensioned to electrically close the circuit and operably conduct the electrical signal between said transmission line segments when said switch blade is rotated into a closed circuit position aligned between said transmission line segments and to electrically open the switch when said blade is rotated into a position out of alignment with said segments;
- and
- control means deposited on said surface and being operable to selectively receive control signals for producing an electrostatic field for operably rotating said switch blade between an open circuit position and a closed circuit position.
A miniature electrostatically actuated switch comprising:
- a substrate of dielectric material having a substantially planar surface;
- a transmission line of electrically conductive material for conducting an electrical signal formed on said surface, said transmission line including a first and a second segment each separated from the other by a gap;
- a hub deposited on and adhering to said surface between said first and second segments of said transmission line;
- a switch blade of electrically conductive material formed over said surface and being operable to rotate about said hub, said switch blade being dimensioned to electrically close the circuit between said transmission line segments and conduct the electrical signal when rotated into a closed switch position;
- and
- control means including control pads formed on said surface at a location displaced from said transmission line segments and being operable to selectively receive control signals for producing an electrical field for operably rotating said switch blade between open circuit and closed circuit positions.
Dependencies are inferred from the claim text.