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US 5,114,683 AGranted
Thermal decomposition trap
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorIkuo Hirase
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AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorIkuo Hirase
Estimating the term…
A thermal decomposition trap includes a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, and a heater (23, 25) for heating the gas supplied in the trap main body (21). An oil trap (28) containing an oil and having an oil discharge port (29) and a valve (V3) connected thereto is formed on a bottom portion of the trap main body (21). Particles generated by thermal decomposition of the gas are precipitated in the oil in the oil trap (28). The oil containing the particles is easily discharged in a short time period by opening the valve (V3) mounted on the oil discharge port (29). An oil-free auxiliary pump is arranged between a reaction chamber and the thermal decomposition trap, whereby a mass flow rate of exhaust from rate in the reaction chamber is not reduced regardless of the arrangement of the thermal decomposition trap.
A thermal decomposition trap comprising a trap main body having an inlet port for supplying a gas to be thermally decomposed and an outlet port for exhausting the gas, and heating means for heating the gas supplied in said trap main body, wherein an oil trap containing an oil and having an oil discharge port and a valve connected thereto is formed on a bottom portion of said trap main body;
A thermal decomposition apparatus comprising, in serial connection, a reaction chamber, a thermal decomposition trap for thermally decomposing a gas from said reaction chamber, and an oil-free auxiliary pump and a main pump for exhausting said reaction chamber;
Dependencies are inferred from the claim text.