Photolithographic method for making helices for traveling wave tubes and other cylindrical objects
AssigneeHughes Aircraft Company
InventorHarold C. Bowers
Life of this patent
Estimating the term…
Loading patent…
AssigneeHughes Aircraft Company
InventorHarold C. Bowers
Estimating the term…
The helix (10) of the slow wave structure of a travelling wave tube is formed on a steel mandrel (12) by depositing the metal (44) of the helix on the mandrel and then coating the deposited metal with a photo resist (46). A laser light beam (24,26), having a cross section in the form of a short line, is focused upon the resist and moved linearly along the axis of the mandrel while the mandrel is rotated. The resulting helical exposure pattern on the photo resist is developed and the remainder of the undeveloped resist is then removed to expose a helical pattern (50,52) of deposited helix metal (44). The latter is subjected to etching processes so as to remove the deposited metal between the turns of the helical resist pattern (54,56), leaving a helix (44) of deposited metal on the mandrel underneath the resist. The resist is then removed and the mandrel etched away to leave the completed helix.
A method for making a helix for a slow wave structure of a traveling wave tube comprising the steps of:
Apparatus for making a helix for a slow wave structure of a traveling wave tube comprising:
A method for making a helix derived device comprising the steps of:
Dependencies are inferred from the claim text.