Method for production of films
OwnerZempachi Ogumi, Zenichiro Takeharainventors
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Abstract
In the method of producing a film which comprises transporting ions in the thickness direction of a film in the course of formation thereof and reacting the ions so transported to one surface of the film with a gas in a reaction chamber, the rate of film formation is increased by applying an external electric field in the thickness direction of the film and eliminating electric charges accumulating on the film surface via a plasma established in front of the film. The method is applicable to ionically conductive films of a solid electrolyte fuel cell or the like.
Claims1
A method of producing a film comprising steps of transporting ions in a thickness direction of the film in the course of formation thereof and reacting the ions thus transported to one surface of said film with a gas within a reaction chamber to give a desired film, wherein said formation of the film is done on a substrate which is a porous electrode, an electric field is applied in said reaction chamber between said porous electrode and a counter electrode and in the thickness direction of the film in the course of formation thereof so as to accelerate transport of ions, and a plasma generated by another pair of electrodes is established in front of said surface to thereby eliminate via said plasma the electric charges accumulating on said surface.
Dependencies are inferred from the claim text.