US 5,110,515 AGranted

Method of encapsulating semiconductor chips

AssigneeHitachi, Ltd.

InventorsShozo Nakamura, Aizo Kaneda, Shigeharu Tsunoda, Akio Hasebe, Masao Mitani

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Abstract

A method for manufacturing plastic package for semiconductor according to the present invention comprises the steps of: forming a mold product of plastic package for semiconductor, which contains therein a semiconductor chip, by molding resin by means of a transfer press; heating the mold product to postcure it during transportation from the transfer press to a heating chamber while the mold product is kept by heaters at a temperature higher than a glass transition temperature of the resin for a predetermined period of time; and further heating the mold product in the heating chamber while the mold product is kept at a temperature substantially equal to the glass transition temperature of the resin for another predetermined period of time.

Claims6

Dependent claims

A method for encapsulating semiconductor chips within a plastic package, said method including the following steps:

positioning a semiconductor chip within a cavity of a mold;
filling said mold with resin and molding said resin into a molded product which contains therein said semiconductor chip, said molding effective to elevate the temperature of said resin to temperature T1, said temperature T1 being sufficient to cause said resin to be moldable within said mold;
heating said molded product to a temperature T2 to post-cure it immediately after said molding, said temperature T2 being higher than a raised glass transition temperature T.sub.g of said resin;
bringing said molded product to a temperature T3 to secondary-cure it said temperature T3 being equal to said raised glass transition temperature T.sub.g of said resin and substantially less than T2;
and,
removing said molded product from said mold and naturally cooling said molded product.

3 more elements

Dependencies are inferred from the claim text.