Processes for electrically conductive decals filled with inorganic insulator material
AssigneeInternational Business Machines Corporation
InventorsMark S. Schneider, John Acocella, Lester W. Herron, Mark R. Kordus, Louis H. Wirtz
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Abstract
The present invention relates generally to new processes for making decals, and more particularly to electrically conductive decals filled with inorganic insulator material. Various methods and processes that are used to make these electrically conductive decals filled with inorganic dielectric material are disclosed.
Claims19
A process for making an electrical connection member, comprising the steps of:
- a) forming an electrically conductive substrate comprising a first electrically conductive material and a second electrically conductive material, wherein said first material and said second material sandwich at least a third electrically conductive material therebetween, and wherein the material for said third electrically conductive material is different than the material for said first and second electrically conductive materials,
- b) patterning and etching said first electrically conductive material to expose at least a portion of said third electrically conductive material and to form at least one first island of said first electrically conductive material,
- c) securing a backing material to said at least one first island,
- d) patterning and etching said second electrically conductive material to expose at least a portion of said third electrically conductive material and to form at least one second island of said second electrically conductive material, wherein said at least one second island is opposite said at least one first island,
- e) removing said exposed third electrically conductive material,
- f) filling the area created by the removal of said exposed third electrically conductive material with an inorganic insulator material, such that at least a portion of said at least one second island is surrounded by said inorganic insulator material, and thereby forming said electrical connection member.
A process for making a multilayered sintered package comprising the steps of:
- a) forming an electrically conductive substrate comprising a first electrically conductive material and a second electrically conductive material, wherein said first material and said second material sandwich at least a third electrically conductive material therebetween, and wherein the material for said third electrically conductive material is different than the material for said first and second electrically conductive materials,
- b) patterning and etching said first electrically conductive material to expose at least a portion of said third electrically conductive material and to form at least one first island of said first electrically conductive material,
- c) securing a backing material to said at least one first island,
- d) patterning and etching said second electrically conductive material to expose at least a portion of said third electrically conductive material and to form at least one second island of said second electrically conductive material, wherein said at least one second island is opposite said at least one first island,
- e) filling the area created by the removal of said second electrically conductive material with an inorganic insulator material, such that at least a portion of said at least one second island is surrounded by said inorganic insulator material,
- f) joining at least a portion of said at least one second island to an electrically conductive member to form a multilayer package,
- g) removing said backing material, and
- h) sintering said multilayered package until said exposed third electrically conductive material changes into a non-electrically conducting oxide material, and thereby forms said multilayered sintered package.
A process for making an electrical connection member, comprising the steps of:
- a) forming an electrically conductive substrate comprising a first electrically conductive material and a second electrically conductive material, wherein said first material and said second material sandwich at least a third electrically conductive material therebetween, and wherein the material for said third electrically conductive material is different than the material for said first and second electrically conductive materials,
- b) patterning and etching said first electrically conductive material to expose at least a portion of said third electrically conductive material and to form at least one first island of said first electrically conductive material,
- c) securing a backing material to said at least one first island,
- d) patterning and etching said second electrically conductive material to expose at least a portion of said third electrically conductive material and to form at least one second island of said second electrically conductive material, wherein said at least one second island is opposite said at least one first island,
- e) removing said exposed third electrically conductive material to form a third island which is cladded by said at least one first island and said at least one second island,
- f) filling the area around said first island, said third island, and said second island with an inorganic insulator material, such that at least a portion of said first island and said second island is surrounded by said inorganic insulator material, and thereby forming said electrical connection member.
A process for making a sintered multilayered device, comprising the steps of:
- a) forming an electrically conductive substrate comprising a first electrically conductive material and a second electrically conductive material, wherein said first material and said second material sandwich at least a third electrically conductive material therebetween, and wherein the material for said third electrically conductive material is different than the material for said first and second electrically conductive materials,
- b) applying a photoresist on said first and said second electrically conductive material and patterning said photoresist,
- c) etching said first electrically conductive material through said patterned photoresist to expose at least a portion of said third electrically conductive material and to form a plurality of first islands from said first electrically conductive material,
- d) removing said photoresist from the surface of said first islands,
- e) applying a blanket layer of an adhesive over said first islands,
- f) adhering a backing material to at least one of said first islands by means of said adhesive,
- g) etching said second electrically conductive material through said patterned photoresist to expose at least a portion of said third electrically conductive material and to form a plurality of second islands from said second electrically conductive material, wherein at least one of said second islands is opposite at least one of said first islands,
- h) removing said photoresist from the surface of said second islands,
- i) removing said exposed third electrically conductive material,
- j) filling at least the area created by the removal of said exposed third electrically conductive material with an inorganic insulator material such that at least a portion of one of said second islands is surrounded by said inorganic insulator material,
- k) joining at least a portion of one of said second islands to an electrically conductive member to form a multilayered package,
- l) removing said backing material and sintering said multilayered package, to form said sintered multilayered device.
Dependencies are inferred from the claim text.