US 5,105,362 A · Method for producing semiconductor devices

Abstract

A system for managing successive processes which are to be performed on a semiconductor wafer in a production line for producing a semiconductor device. The system comprises a process managing block for receiving data on preceding processes which have already been performed on the semiconductor wafer on the production line and delivers conditions for the processes which are to be subsequently performed on the production line, a data accumulation block for statistically accumulating data concerning preceding processes carried out on the production line, and a simulation block for determining optimum conditions for the processes which are to be subsequently performed based on the data concerning the preceding processes which have been actually performed on the production line and the statistical data accumulated on the data accumulation block. The simulation block provides optimum process conditions to the process managing block. Any deviation of the characteristics of the unfinished product caused by preceding processes are compensated for by appropriately varying the conditions of the subsequent processes whereby semiconductor products of high quality are produced with a high yield.

Claims2

Dependent claims

inputting to the production line a recipe for each of a plurality of individual production steps, each step being at least one process in the production line that is supplied with unfinished semiconductor devices at the beginning of the production line, produces partly finished semiconductor devices in the production line, and produces finished semiconductor devices at the end of the production line;
monitoring data concerning at least one of the processes which has already been carried out on partially finished semiconductor devices in accordance with at least one recipe;
simulating the opertional characteristics of finished semiconductor devices from the data concerning the partially finished semiconductor devices and the recipes input to at least one of the production steps for producing finished semiconductor devices from the partially finished semiconductor devices;
determining process conditions for the processes to produce finished semiconductor devices from the partially finished semiconductor devices in response to the simulation of operational characteristics of the semiconductor devices to produce finished semiconductor devices having desired operational characteristics;
and
controlling process conditions in response to the determined process conditions of at least one process to be carried out to produce, from partially finished semiconductor devices, finished semiconductor devices having the desired operational characteristics.

3 more elements

A method for producing semiconductor devices that are produced by a plurality of successive individual production steps in a production line to produce finished semiconductor devices from unfinished semiconductor devices and by a plurality of individual inspection steps for obtaining data concerning partially finished semiconductor devices in the production line comprising:

inputting to the production line a recipe for each of a plurality of individual production steps, each step being at least one process in the production line that is supplied with unfinished semiconductor devices at the beginning of the production line, produces partly finished semiconductor devices in the production line, and produces finished semiconductor devices at the end of the production line;
monitoring data concerning at least one of the processes which has already been carried out on partially finished semiconductor devices in accordance with at least one recipe;
collecting data concerning at least one inspection of partially finished semiconductor devices processed in accordance with at least one of the recipes;
simulating the operational characteristics of finished semiconductor devices from the data concerning the partially finished semiconductor devices and the recipes input to at least one of the production steps for producing finished semiconductor devices from the partially finished semiconductor devices;
determining process conditions for the processes to produce finished semiconductor devices from the partially finished semiconductor devices in response to the simulation of operational characteristics of finished semiconductor devices and the collected data in order to produce finished semiconductor devices having desired operational characteristics;
and
controlling process conditions in response to the determined process conditions of at least one process to be carried out to produce, from partially finished semiconductor devices, finished semiconductor devices having the desired operational characteristics.

4 more elements

Dependencies are inferred from the claim text.

Method for producing semiconductor devices

Life of this patent

Method for producing semiconductor devices

Life of this patent

Abstract

Claims2