Localized vacuum apparatus and method

A method for generating a localized, non-contact vacuum seal at a selected region of a workpiece surface and for processing the workpiece, the method comprising the steps of

• positioning, in selected proximity with the workpiece surface, a vacuum body having a workpiece-facing surface including a periphery, a central region, and a plurality of non-intersecting circumferential grooves with at least an outermost groove adjacent said periphery and an innermost groove adjacent said central region,
• differentially evacuating said grooves so that said grooves define differentially evacuated chambers reducing influx of atmospheric particles to said central region,
• introducing a selected inert control gas into a selected groove to further reduce said influx of atmospheric particles to said central region,
• directing an energy beam through said vacuum body to the workpiece surface, and
• introducing a selected reactive gas mixture into said central region to migrate into, and react in, the path of the energy beam, to produce a selected reaction at the selected region of the workpiece surface at which the localized vacuum seal is generated, said control gas substantially preventing contamination of said reaction by said atmospheric particles.

A method for generating a localized, non-contact vacuum seal at a selected region of a workpiece surface, the method comprising the steps of

• positioning, in selected proximity with the workpiece surface, a vacuum body having a workpiece-facing surface including a periphery, a central region, and a plurality of non-intersecting circumferential grooves with at least an outermost groove adjacent said periphery and an innermost groove adjacent said central region,
• differentially evacuating said grooves so that said grooves define differentially evacuated chambers reducing influx of atmospheric particles to said central region,
• introducing a selected inert control gas into a selected groove to further reduce said influx of atmospheric particles to said central region,
• directing an energy beam through said vacuum body to the workpiece surface,
• introducing a selected reactive gas mixture into said central region to migrate into, and react in, the path of the energy beam,
• said step of introducing a selected reactive gas mixture including the step of introducing a reactive component for reacting in the path of the energy beam to deposit a selected reaction product on the workpiece surface,
• wherein said step of introducing a reactive component includes the step of introducing cobalt carbonyl, and
• inhibiting deposition of black crystals containing cobalt.