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US 5,097,800 AGranted
High speed apparatus for forming capacitors
AssigneeSpectrum Control, Inc.
InventorsDavid G. Shaw, Angelo Yializis, Donald S. Strycker, Mooyoung Ham
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AssigneeSpectrum Control, Inc.
InventorsDavid G. Shaw, Angelo Yializis, Donald S. Strycker, Mooyoung Ham
Estimating the term…
A high speed apparatus for forming capacitors includes a vacuum chamber in which is located a carrier defining a continuous surface configured to move at a rate of from about 150 feet per minute to about 600 feet per minute during the forming operation, a metal depositing device, a dielectric depositing device, and a radiation source. The metal depositing device is configured to deposit layers of metal onto the moving surface, and the dielectric depositing device includes (a) a device for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of the monomer, (b) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (c) device for thereafter condensing the flash-vaporized monomer on the metal layers to form a monomer coating on successive layers. The radiation source is positioned for curing successive monomer coatings after each such coating has been deposited, to thereby form a polymer dielectric layer. Apparatus are provided for controlling each of the devices so that metal is deposited, a monomer coating is deposited, and the monomer coating is cured to form the polymer dielectric layer before the continuous surface passes the devices again for successive metal layers, monomer coatings, and curings.
A high-speed apparatus for forming capacitors comprising a vacuum chamber, a carrier in the vacuum chamber defining a continuous surface configured to move at a rate of from about 150 feed per minute to about 600 feed per minute during the forming operation, a metal depositing device in the vacuum chamber for depositing layers of metal on the moving surface, a dielectric depositing device in the vacuum chamber, the dielectric depositing device including (a) means for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of said monomer, (b) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (c) means for thereafter condensing the flash-vaporized monomer on the metal layers to thereby form a monomer coating on each successive metal layer, a radiation source in the vacuum chamber positioned for curing successive monomer coatings after each such coating has been deposited to thereby form a polymer dielectric layer, and means for controlling each of the devices so that metal is deposited, a monomer coating is deposited, and the monomer coating is cured to form the polymer dielectric layer before the moving surface passes the devices again for successive metal layers, monomer coatings and curings.
An apparatus for continuously producing, under vacuum, a monolithic multi-layer capacitor on a substrate surface, the apparatus comprising means for forming a layer of electrode material on a surface within at least one predefined electrode forming zone, means for forming a coating of dielectric material on a surface within at least one predefined dielectric forming zone with the dielectric material being bondable with the with the dielectric material being bondable with the electrode material, the dielectric-forming means comprising (a) a deposition device comprising (1) means for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of said monomer, (2) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (3) means for thereafter condensing the flash-vaporized monomer on the electrode material to form a monomer coating and (b) a radiation source positioned for curing the monomer coating after it has been fully deposited to thereby form the dielectric coating, and means for passing the substrate surface carrying the electrode material layers and the dielectric coatings at a rate of from about 150 feet per minute to about 600 feet per minute repeatedly through the electrode and dielectric forming zones in sequence so that different positions of the moving surface are simultaneously within their respective zones so as to produce alternate layers of electrode material and dielectric coating one on top of the other on the substrate surface.
An apparatus for producing a capacitor under vacuum on a substrate comprising means for forming a layer of electrode material of predetermined thickness on a surface within at least one predefined electrode forming zone, means for forming a coating of radiation-curable material comprising a polyfunctional acrylic monomer of predetermined thickness on a surface within at least one predefined dielectric forming zone, said coating means comprising (a) means for atomizing the polyfunctional acrylic monomer to form liquid droplets of said monomer, (b) a heated surface on which the atomized droplets impinge and are flashed vaporized, and (c) means for thereafter condensing the flash-vaporized monomer on the electrode layer, a radiation source for curing the completed dielectric monomer coating within the dielectric forming zone to thereby form a cured polymer dielectric coating, means for moving the substrate surface at a rate of from about 150 feet per minute to about 600 feet per minute alternately into the electrode forming zone and the dielectric forming zone, and means for controlling the electrode layer forming means, the monomer coating forming means, the curing means and the moving means so as to produce alternate layers of electrode material and cured dielectric coating.
An apparatus for forming multi-layered capacitors comprising:
Dependencies are inferred from the claim text.