Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same
AssigneeAir Products and Chemicals, Inc.
InventorsJohn A. T. Norman, John C. Ivankovits, David A. Roberts, David A. Bohling
Life of this patent
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Abstract
This invention is a residue-free cleaning process for removing metal-containing contaminants from a surface of a substrate of the type used in manufacturing semi-conductor devices. The process comprises contacting the substrate with an effective amount of a cleaning agent comprising a .beta.-diketone or .beta.-ketoimine dispersed in an atmosphere capable of oxidizing the metal-contaminants at a temperature sufficient to form volatile metal-ligand complexes on the surface of the substrate. The volatile metal-ligand complexes are sublimed from the surface of the substrate leaving essentially no residue.
Claims35
A cleaning agent for removing metal-containing contaminants from a surface of a substrate, the cleaning agent comprising a .beta.-diketone or .beta.-ketoimine ligand which is dispersed in an atmosphere capable of oxidizing the metal-containing contaminants residing on the surface of the substrate, the .beta.-diketone or .beta.-ketoimine ligand which is represented by the formula:
- ##STR10## wherein:
- R.sub.1 and R.sub.3 are independently selected from a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl, alkenyl or aryl group having from 1 to about 8 carbon atoms;
- R.sub.2 is a hydrogen atom, a fluorine atom or a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl or alkenyl group having from 1 to about 8 carbon atoms;
- and
- Y is selected from an oxygen atom;
- N--R.sub.4 wherein R.sub.4 is selected from a non-fluorinated, partially fluorinated, or fully fluorinated alkyl, aryl, aralkyl or hydroxyalkyl group having from 1 to about 10 carbon atoms, or Y is ##STR11## wherein:
- R.sub.5, R.sub.6 and R.sub.7 are independently selected from a hydrogen atom, a fluorine atom or a linear or branched non-fluorinated, partially fluorinated or fully fluorinated alkyl or alkenyl group having from 1 to about 8 carbon atoms;
- and
- R.sub.8 is a linear or branched non-fluorinated, partially fluorinated or fully fluorinated alkylene, alkenylene, phenylene, alkylphenylene or hydroxyalkylene group having from 1 to about 8 carbon atoms;
- with the proviso that the ligand is not capable of reacting with the substrate.
A cleaning agent for removing metal-containing contaminants from a surface of a substrate, the cleaning agent comprising a .beta.-diketone ligand which is dispersed in an atmosphere capable of oxidizing the metal-containing contaminants residing on the surface of the substrate, the .beta.-diketone which is represented by the formula:
- ##STR12## R.sub.1 and R.sub.3 are independently selected from a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl, alkenyl or aryl group having from 1 to about 8 carbon atoms;
- and
- R.sub.2 is a hydrogen atom, a fluorine atom or a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl or alkenyl group having from 1 to about 8 carbon atoms;
- with the proviso that the ligand is not capable of reacting with the substrate.
A cleaning agent for removing metal-containing contaminants from a surface of a substrate, the cleaning agent comprising a .beta.-ketoimine ligand which is dispersed in an atmosphere capable of oxidizing the metal-containing contaminants residing on the surface of the substrate, the .beta.-ketoimine ligand which is represented by the formula:
- ##STR13## wherein:
- R.sub.1 and R.sub.3 are independently selected from a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl, alkenyl or aryl group having from 1 to about 8 carbon atoms;
- R.sub.2 is a hydrogen atom, a fluorine atom or a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl or alkenyl group having from 1 to about 8 carbon atoms;
- and
- R.sub.4 is selected from a non-fluorinated, partially fluorinated or fully fluorinated alkyl, aralkyl or hydroxyalkyl group having from 1 to about 10 carbon atoms;
- with the proviso that the ligand is not capable of reacting with the substrate.
A cleaning agent for removing metal-containing contaminants from a surface of a substrate, the cleaning agent comprising a .beta.-ketoimine ligand which is dispersed in an atmosphere capable of oxidizing the metal-containing contaminants residing on the surface of the substrate, the .beta.-ketoimine ligand which is represented by the formula:
- ##STR14## wherein:
- R.sub.1 and R.sub.3 are independently selected from a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl, alkenyl or aryl group having from 1 to about 8 carbon atoms;
- R.sub.2 is a hydrogen atom, a fluorine atom or a linear or branched non-fluorinated, partially-fluorinated or fully fluorinated alkyl or alkenyl group having from 1 to about 8 carbon atoms;
- R.sub.5, R.sub.6 and R.sub.7 are independently selected from a hydrogen atom, a fluorine atom or a partially fluorinated or fully fluorinated alkyl or alkenyl group having from 1 to about 8 carbon atoms;
- and
- R.sub.8 is a non-fluorinated, partially fluorinated or fully fluorinated linear or branched alkylene, alkenylene, phenylene, alkylphenylene or hydroxyalkylene group having from 1 to about 8 carbon atoms;
- with the proviso that the ligand is not capable of reacting with the substrate.
Dependencies are inferred from the claim text.