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US 5,093,573 AGranted
Reflection electron diffractometer and method for observing microscopic surface structure
OwnerNobuo Mikoshiba, Tadashiro Ohmi +2inventors
InventorsNobuo Mikoshiba, Tadashiro Ohmi, Kazuo Tsubouchi, Kazuya Masu
Life of this patent
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Abstract
An improved RHEED apparatus and a method for observing step-like surface irregularities of a sample by the use of the improved RHEED apparatus.
Claims2
A reflection high energy electron diffraction apparatus comprising:
- an electron beam source means for emitting a sample-irradiating electron beam with a diameter of about 0.1 micro-meter, said electron beam source being provided with means capable of having said electron beam scan a sample;
- a goniometric sample holder means for holding said sample;
- a flourescent screen for receiving diffracted electron beams from said sample;
- a plurality of displaceable light guide means for receiving light signals from said fluorescent screen;
- a photoelectric converting means connected to said light guide means for converting said light signals to electrical signals;
- arithmetic means for computing a mathematical linear combination of said electrical signals;
- and
- a display means for displaying a crystallographical surface aspect of said sample according to an output from said arithmetic means, with said sample-irradiating electron beam made to scan said sample.
5 more elements
A method of observing step-like unevenness on a surface of a sample by using an apparatus having an electron beam source which emits a sample-irradiating electron beam with a diameter of about 0.1 micro-meter and scans a sample;
- a goniometric sample holder which holds said sample;
- a fluorescent screen for receiving diffracted electron beams from said sample;
- a plurality of displaceable light guides which receive light signals from said fluorescent screen;
- a photoelectric converter connected to said light guides which converts said light signals to electrical signals;
- arithmetic device which computes a mathematical linear combination of said electrical signals;
- and a display which displays a crystallographical surface aspect of said sample according to an output from said arithmetic device, said method comrpising the steps of:
- scanning said sample with an electron beam;
- picking up light intensities at different points in the same diffraction spot or light intensities at different diffraction spots of said sample, said different points or said different diffraction spots having their luminosities mutually inverted when sample-scanning electron beam sweeps at riser portions of said step-like unevenness formed on the surface of said sample;
- and
- perfoming an arithmetic operation based on said light intensities.
7 more elements
Dependencies are inferred from the claim text.