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US 5,092,740 AGranted
Composite vacuum pump
AssigneeNippon Ferrofluidics Corporation
InventorAkira Yamamura
Life of this patent
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Abstract
A composite vacuum pump system having first and second vacuum pumps each having its own rotor and drive motor in which the exhaust of the first vacuum pump is removably coupled to the inlet of the second vacuum pump and the first vacuum pump rotor is driven at a constant torque and in which the second vacuum pump has an inlet for permitting the introduction into the pump of a heavy gas for increasing the efficiency of the pumping system.
Claims4
A composite vacuum pump comprising:
- a first vacuum pump having a first drive means and a first rotor means driven by said first drive contained within a housing means;
- said housing means having gas inlet and gas outlet means;
- a second vacuum pump having a second drive means and a second rotor means driven by said second drive means contained within a housing means;
- said housing means having gas inlet and gas outlet means;
- said first pump outlet means connected to the inlet means of said second pump;
- said first drive means being driven at constant torque.
3 more elements
Dependencies are inferred from the claim text.