Manufacturing method for a multilayer printed circuit board
AssigneeInternational Business Machines Corporation
InventorTakahiro Murakami
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AssigneeInternational Business Machines Corporation
InventorTakahiro Murakami
Estimating the term…
Disclosed is a method for manufacturing a multilayer circuit board in which landless inter-layer connection is made between a lower-layer electric circuit and an upper-layer electric circuit formed on a substrate. The method of the invention utilizes a single photoresist to form a circuitization layer and the conductive via extending upwardly from it. In the method of the invention a metal layer is applied to the substrate, and photoresist is applied to the metal layer. The photoresist is then exposed and developed to define a resist hole. A via bump is formed in the resist hole. The residual resist is then imaged to form a first circuit pattern in the underlying metal layer. The remaining photoresist is removed from the first metal layer, and an organic dielectric layer is formed on the etched metal layer, the exposed substrate, and via bump. The organic dielectric layer is then flattened or otherwise processed to expose the surface of the via bump. Either a second metal layer or an electronic part is deposited or applied to the exposed top surface of the via bump as an upper-layer electric circuit element.
A method for manufacturing a multilayer circuit board in which inter-layer connection is made between a lower-layer electric circuit and an upper-layer electric circuit formed on a substrate, comprising steps of:
The method of claim (1) for manufacturing a multilayer circuit board, wherein said via bump consists of the same material as said first metal layer, and a protective film consisting of a material different from said material is formed on the upper portion of the plating via bump.
The method of claim (1) for manufacturing a multilayer circuit board, wherein said photoresist is a positive photoresist.
A method for manufacturing a multilayer circuit board, in which inter-layer connection is made between a lower-layer electric circuit and an upper-layer electric circuit formed on a substrate, comprising steps of:
The method of claim (4) for manufacturing a multilayer wiring board, wherein said via bump plating via bump consists of the same material as said metal layer, and a protective film consisting of a material different from said material is formed in the upper portion of the plating via bump.
The method of claim (4) for manufacturing a multilayer circuit board, wherein said photoresist is a positive photoresist.
Dependencies are inferred from the claim text.