Process for attaching large area silicon-backed chips to gold-coated surfaces
AssigneeHughes Aircraft Company
InventorBarret Lippey
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AssigneeHughes Aircraft Company
InventorBarret Lippey
Estimating the term…
A method for eutectically attaching a silicon chip to a gold-coated substrate. Prior to heating and scrubbing of the silicon chip against the gold surface, a gold lattice structure is placed between the silicon chip bottom surface and the gold surface. The gold lattice structure contacts the silicon chip bottom surface over an area equal to less than ten percent of the total surface area of the chip bottom surface. The point source contact between the gold lattice and silicon chip promotes formation of the gold/silicon eutectic alloy at temperatures of between 400.degree. to 475.degree. C. The gold/silicon eutectic alloy spreads between the silicon chip bottom surface and gold top surface to provide eutectic bonding. The method is especially useful in bonding relatively large silicon chips or dies to gold-coated substrates wherein the bottom surface or back side of the chip is not coated with a protective metal layer.
A method for attaching a silicon chip to a substrate wherein said silicon chip has a bottom surface having a surface area and said substrate has a gold top surface, said method comprising the steps of:
In a method for eutectically attaching a silicon chip to a substrate having a gold top surface, wherein the bottom surface of said silicon chip is scrubbed against said gold top surface at a temperature above the melting point of the gold/silicon eutectic, the improvement comprising:
Dependencies are inferred from the claim text.