Process for preparing disilane by using molecular sieves
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsJean-Claude Parent, Marie-Helene Renaudin
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Abstract
Process for preparing disilane, wherein a raw gas including monosilane, disilane, trisilane and impurities such as phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, undergoes a step of separation by distillation for the substantial elimination of the other compounds of silicon, except disiloxane, and the substantial elimination of phosphine, hydrogen sulfide and arsine impurities, wherein a final purification of the disilane takes place by selective adsorption on molecular sieves, in which one is a sieve of type 3 A and which is used for the elimination of the siloxanes and hydrogen sulfide and the other is a sieve of type 4 A for the elimination of phosphine and arsine.
Claims3
A process for preparing substantially purified disilane from a raw gas including monosilane, disilane, trisilane and impurities of phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, comprising:
- separating by distillation to substantially eliminate compounds of silicon, except disiloxane, and substantially eliminating impurities comprising phosphine, hydrogen sulfide and arsine by selective adsorption on molecular sieves, wherein one sieve is type 3 A and eliminates siloxanes and hydrogen sulfide and another sieve is type 4 A and eliminates phosphine and arsine to provide a substantially purified disilane.
Dependencies are inferred from the claim text.