Temperature and pressure measuring technique using the photoacoustic effect and mechanical resonance
AssigneeMicron Technology, Inc.
InventorChang Yu
Life of this patent
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Abstract
A method of measuring the temperature of a sample or alternately, the pressure surrounding a sample, consists of using the photoacoustic effect to measure the resonant frequency of the sample. By measuring the resonant frequency of an object, which varies with changes in the temperature of the sample and the pressure surrounding the sample, a greater signal-to-noise ratio is achieved, thereby increasing the accuracy and robustness of the disclosed method over previous methods of measurement using the photoacoustic effect. To determine the desired parameter, the resulting resonant frequency is compared to values on like samples (or on the sample itself) under known environmental conditions.
Claims6
A method of measuring a physical aspect of an object using a laser source and an interdigital capacitor, comprising:
- a) focusing a modulated laser beam on the object;
- b) measuring the resulting vibration amplitude of the object with said interdigital capacitor;
- c) determining the resonant frequency of the object by adjusting the modulation frequency of said laser beam until said resulting vibration amplitude of the object is maximized;
- and
- d) comparing said resonant frequency to known resonant frequencies calibrated from similar objects with respect to said physical aspect, thereby obtaining a measurement of said physical aspect.
A method of measuring an environmental parameter surrounding an object using a laser source and an interdigital capacitor, comprising:
- a) focusing a modulated laser beam on the object;
- b) measuring the resulting vibration amplitude of the object;
- c) determining the resonant frequency of the object by adjusting the modulation frequency of said laser beam until said resulting vibration amplitude of the object is maximized;
- and
- d) comparing said resonant frequency to known resonant frequencies calibrated from known environmental parameters from similar objects, thereby obtaining a measurement of said environmental parameter.
Dependencies are inferred from the claim text.