Electric probing-test machine having a cooling system

An electric probing-test machine comprising:

• probe means having a plurality of probes contacted with an object and serving to apply test signal to a tester which judges whether circuits on the object are correct or deficient;
• chuck means, having a chuck top contacted directly with the object, for holding the object;
• cooling means for cooling the chuck means, and
• control means for controlling the cooling means wherein said chuck means includes:
• a heat exchange jacket arranged to conduct heat exchange relative to the chuck top;
• a cooling plate arranged between said chuck top and said heat exchange jacket;
• Peltier elements arranged between said chuck top and said heat exchange jacket;
• temperature detecting means for detecting the temperature of the chuck top;
• and
• coolant supply means, being included in said cooling means, for supplying a coolant from a coolant reservoir to the heat exchange jacket;
• wherein current applied to said Peltier elements and the amount of the coolant supplied from the coolant supply means to the heat exchange jacket is controlled by the control means responsive to temperature information detected by the temperature detecting means to thereby control the temperature of the chuck top.