System for manufacturing semiconductor substrates

A system for manufacturing substrates, in particular wafers, glass masks, and channels, having individual process stations for treating and/or processing the various substrates in a clean environment, comprising:

• a plurality of interchangeable and aligned process modules;
• a media bus situated parallel to the aligned process modules;
• inflow and outflow lines carried within the media bus, said inflow and outflow lines serving to supply the individual process modules with and removing therefrom the necessary chemicals, gases, liquids, data and energy;
• a plurality of coupling boxes for coupling the plurality of process modules to said media bus;
• and
• a countercoupling mounted to each process module, each countercoupling being coupled to a respective coupling box for thereby connecting the inflow and outflow lines to the process module of the countercoupling and being uncoupled from its respective coupling box for thereby disconnecting the inflow and outflow lines from the process module of the countercoupling.